JPS5236982A - Process for production of mos type semiconductor integrated circuit de vices - Google Patents

Process for production of mos type semiconductor integrated circuit de vices

Info

Publication number
JPS5236982A
JPS5236982A JP50113342A JP11334275A JPS5236982A JP S5236982 A JPS5236982 A JP S5236982A JP 50113342 A JP50113342 A JP 50113342A JP 11334275 A JP11334275 A JP 11334275A JP S5236982 A JPS5236982 A JP S5236982A
Authority
JP
Japan
Prior art keywords
vices
production
integrated circuit
type semiconductor
semiconductor integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50113342A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Takagi
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50113342A priority Critical patent/JPS5236982A/en
Publication of JPS5236982A publication Critical patent/JPS5236982A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To achieve the increase in speed and rate of integration by incorporating advantages of both of MOSFET and SOS-MOSFET.
COPYRIGHT: (C)1977,JPO&Japio
JP50113342A 1975-09-18 1975-09-18 Process for production of mos type semiconductor integrated circuit de vices Pending JPS5236982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50113342A JPS5236982A (en) 1975-09-18 1975-09-18 Process for production of mos type semiconductor integrated circuit de vices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50113342A JPS5236982A (en) 1975-09-18 1975-09-18 Process for production of mos type semiconductor integrated circuit de vices

Publications (1)

Publication Number Publication Date
JPS5236982A true JPS5236982A (en) 1977-03-22

Family

ID=14609802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50113342A Pending JPS5236982A (en) 1975-09-18 1975-09-18 Process for production of mos type semiconductor integrated circuit de vices

Country Status (1)

Country Link
JP (1) JPS5236982A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106868A (en) * 1981-12-18 1983-06-25 Hitachi Ltd Insulated gate type field-effect semiconductor device and manufacture thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830882A (en) * 1971-08-23 1973-04-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830882A (en) * 1971-08-23 1973-04-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106868A (en) * 1981-12-18 1983-06-25 Hitachi Ltd Insulated gate type field-effect semiconductor device and manufacture thereof

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