JPS5236982A - Process for production of mos type semiconductor integrated circuit de vices - Google Patents
Process for production of mos type semiconductor integrated circuit de vicesInfo
- Publication number
- JPS5236982A JPS5236982A JP50113342A JP11334275A JPS5236982A JP S5236982 A JPS5236982 A JP S5236982A JP 50113342 A JP50113342 A JP 50113342A JP 11334275 A JP11334275 A JP 11334275A JP S5236982 A JPS5236982 A JP S5236982A
- Authority
- JP
- Japan
- Prior art keywords
- vices
- production
- integrated circuit
- type semiconductor
- semiconductor integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To achieve the increase in speed and rate of integration by incorporating advantages of both of MOSFET and SOS-MOSFET.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50113342A JPS5236982A (en) | 1975-09-18 | 1975-09-18 | Process for production of mos type semiconductor integrated circuit de vices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50113342A JPS5236982A (en) | 1975-09-18 | 1975-09-18 | Process for production of mos type semiconductor integrated circuit de vices |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5236982A true JPS5236982A (en) | 1977-03-22 |
Family
ID=14609802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50113342A Pending JPS5236982A (en) | 1975-09-18 | 1975-09-18 | Process for production of mos type semiconductor integrated circuit de vices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5236982A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58106868A (en) * | 1981-12-18 | 1983-06-25 | Hitachi Ltd | Insulated gate type field-effect semiconductor device and manufacture thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4830882A (en) * | 1971-08-23 | 1973-04-23 |
-
1975
- 1975-09-18 JP JP50113342A patent/JPS5236982A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4830882A (en) * | 1971-08-23 | 1973-04-23 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58106868A (en) * | 1981-12-18 | 1983-06-25 | Hitachi Ltd | Insulated gate type field-effect semiconductor device and manufacture thereof |
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