JPS5422776A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5422776A
JPS5422776A JP8726777A JP8726777A JPS5422776A JP S5422776 A JPS5422776 A JP S5422776A JP 8726777 A JP8726777 A JP 8726777A JP 8726777 A JP8726777 A JP 8726777A JP S5422776 A JPS5422776 A JP S5422776A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacture
manfuacture
carrying
annealing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8726777A
Other languages
Japanese (ja)
Inventor
Sunao Shibata
Nozomi Harada
Haruo Okano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8726777A priority Critical patent/JPS5422776A/en
Publication of JPS5422776A publication Critical patent/JPS5422776A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To manfuacture a semiconductor device featuring excellent characteristics by carrying out an annealing process in the non-oxidizing atmosphere before the field oxidation and after the ion injection.
COPYRIGHT: (C)1979,JPO&Japio
JP8726777A 1977-07-22 1977-07-22 Manufacture of semiconductor device Pending JPS5422776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8726777A JPS5422776A (en) 1977-07-22 1977-07-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8726777A JPS5422776A (en) 1977-07-22 1977-07-22 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5422776A true JPS5422776A (en) 1979-02-20

Family

ID=13909981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8726777A Pending JPS5422776A (en) 1977-07-22 1977-07-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5422776A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162850A (en) * 1980-05-20 1981-12-15 Fujitsu Ltd Manufacture of semiconductor device
JPS5797678A (en) * 1980-12-10 1982-06-17 Ibm Method of producing insulated gate type field effect transistor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162850A (en) * 1980-05-20 1981-12-15 Fujitsu Ltd Manufacture of semiconductor device
JPS5797678A (en) * 1980-12-10 1982-06-17 Ibm Method of producing insulated gate type field effect transistor

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