JPS5422776A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5422776A JPS5422776A JP8726777A JP8726777A JPS5422776A JP S5422776 A JPS5422776 A JP S5422776A JP 8726777 A JP8726777 A JP 8726777A JP 8726777 A JP8726777 A JP 8726777A JP S5422776 A JPS5422776 A JP S5422776A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacture
- manfuacture
- carrying
- annealing process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Abstract
PURPOSE: To manfuacture a semiconductor device featuring excellent characteristics by carrying out an annealing process in the non-oxidizing atmosphere before the field oxidation and after the ion injection.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8726777A JPS5422776A (en) | 1977-07-22 | 1977-07-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8726777A JPS5422776A (en) | 1977-07-22 | 1977-07-22 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5422776A true JPS5422776A (en) | 1979-02-20 |
Family
ID=13909981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8726777A Pending JPS5422776A (en) | 1977-07-22 | 1977-07-22 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5422776A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162850A (en) * | 1980-05-20 | 1981-12-15 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5797678A (en) * | 1980-12-10 | 1982-06-17 | Ibm | Method of producing insulated gate type field effect transistor |
-
1977
- 1977-07-22 JP JP8726777A patent/JPS5422776A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56162850A (en) * | 1980-05-20 | 1981-12-15 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5797678A (en) * | 1980-12-10 | 1982-06-17 | Ibm | Method of producing insulated gate type field effect transistor |
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