JPS5345177A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5345177A
JPS5345177A JP12010476A JP12010476A JPS5345177A JP S5345177 A JPS5345177 A JP S5345177A JP 12010476 A JP12010476 A JP 12010476A JP 12010476 A JP12010476 A JP 12010476A JP S5345177 A JPS5345177 A JP S5345177A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
performming
annealing
reduce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12010476A
Other languages
Japanese (ja)
Inventor
Hitoshi Hasegawa
Kunihiko Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12010476A priority Critical patent/JPS5345177A/en
Publication of JPS5345177A publication Critical patent/JPS5345177A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the number and size of stacking faults by performming annealing in an inert gas such as N2, etc. after halogen oxidation.
COPYRIGHT: (C)1978,JPO&Japio
JP12010476A 1976-10-06 1976-10-06 Production of semiconductor device Pending JPS5345177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12010476A JPS5345177A (en) 1976-10-06 1976-10-06 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12010476A JPS5345177A (en) 1976-10-06 1976-10-06 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5345177A true JPS5345177A (en) 1978-04-22

Family

ID=14778013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12010476A Pending JPS5345177A (en) 1976-10-06 1976-10-06 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5345177A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972508A (en) * 1982-10-20 1984-04-24 Takamatsu Kikai Kogyo Kk Working order setting circuit of machine tool
JPS60133734A (en) * 1983-12-21 1985-07-16 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS6120674A (en) * 1984-07-06 1986-01-29 Matsushita Electric Ind Co Ltd Control device for resistance welder
US5506178A (en) * 1992-12-25 1996-04-09 Sony Corporation Process for forming gate silicon oxide film for MOS transistors
US6981588B2 (en) 2001-03-30 2006-01-03 Yugen Kaisha Toho Label Packaging material for commodity

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972508A (en) * 1982-10-20 1984-04-24 Takamatsu Kikai Kogyo Kk Working order setting circuit of machine tool
JPS60133734A (en) * 1983-12-21 1985-07-16 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH026223B2 (en) * 1983-12-21 1990-02-08 Mitsubishi Electric Corp
JPS6120674A (en) * 1984-07-06 1986-01-29 Matsushita Electric Ind Co Ltd Control device for resistance welder
US5506178A (en) * 1992-12-25 1996-04-09 Sony Corporation Process for forming gate silicon oxide film for MOS transistors
US6981588B2 (en) 2001-03-30 2006-01-03 Yugen Kaisha Toho Label Packaging material for commodity

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