JPS53129977A - Production of semiconductor device having moats - Google Patents
Production of semiconductor device having moatsInfo
- Publication number
- JPS53129977A JPS53129977A JP4446677A JP4446677A JPS53129977A JP S53129977 A JPS53129977 A JP S53129977A JP 4446677 A JP4446677 A JP 4446677A JP 4446677 A JP4446677 A JP 4446677A JP S53129977 A JPS53129977 A JP S53129977A
- Authority
- JP
- Japan
- Prior art keywords
- moats
- shoulder parts
- production
- semiconductor device
- forming electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To prevent step-cuting at the shoulder parts of moats by thinly depositing a photosensitive corrosion-resistant material on a semiconductor substrate, exposing moat shoulder parts and making the shoulder parts gentle-sloping by etching thereafter forming electrode wirings at the time of forming electrode wirings on the substrate formed with moats.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4446677A JPS53129977A (en) | 1977-04-20 | 1977-04-20 | Production of semiconductor device having moats |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4446677A JPS53129977A (en) | 1977-04-20 | 1977-04-20 | Production of semiconductor device having moats |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53129977A true JPS53129977A (en) | 1978-11-13 |
Family
ID=12692264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4446677A Pending JPS53129977A (en) | 1977-04-20 | 1977-04-20 | Production of semiconductor device having moats |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53129977A (en) |
-
1977
- 1977-04-20 JP JP4446677A patent/JPS53129977A/en active Pending
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