JPS53129977A - Production of semiconductor device having moats - Google Patents

Production of semiconductor device having moats

Info

Publication number
JPS53129977A
JPS53129977A JP4446677A JP4446677A JPS53129977A JP S53129977 A JPS53129977 A JP S53129977A JP 4446677 A JP4446677 A JP 4446677A JP 4446677 A JP4446677 A JP 4446677A JP S53129977 A JPS53129977 A JP S53129977A
Authority
JP
Japan
Prior art keywords
moats
shoulder parts
production
semiconductor device
forming electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4446677A
Other languages
Japanese (ja)
Inventor
Makoto Haneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4446677A priority Critical patent/JPS53129977A/en
Publication of JPS53129977A publication Critical patent/JPS53129977A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent step-cuting at the shoulder parts of moats by thinly depositing a photosensitive corrosion-resistant material on a semiconductor substrate, exposing moat shoulder parts and making the shoulder parts gentle-sloping by etching thereafter forming electrode wirings at the time of forming electrode wirings on the substrate formed with moats.
COPYRIGHT: (C)1978,JPO&Japio
JP4446677A 1977-04-20 1977-04-20 Production of semiconductor device having moats Pending JPS53129977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4446677A JPS53129977A (en) 1977-04-20 1977-04-20 Production of semiconductor device having moats

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4446677A JPS53129977A (en) 1977-04-20 1977-04-20 Production of semiconductor device having moats

Publications (1)

Publication Number Publication Date
JPS53129977A true JPS53129977A (en) 1978-11-13

Family

ID=12692264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4446677A Pending JPS53129977A (en) 1977-04-20 1977-04-20 Production of semiconductor device having moats

Country Status (1)

Country Link
JP (1) JPS53129977A (en)

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