JPS5335475A - Production of semiconductor unit - Google Patents

Production of semiconductor unit

Info

Publication number
JPS5335475A
JPS5335475A JP11030076A JP11030076A JPS5335475A JP S5335475 A JPS5335475 A JP S5335475A JP 11030076 A JP11030076 A JP 11030076A JP 11030076 A JP11030076 A JP 11030076A JP S5335475 A JPS5335475 A JP S5335475A
Authority
JP
Japan
Prior art keywords
production
film
semiconductor unit
positive
photosensitive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11030076A
Other languages
Japanese (ja)
Inventor
Tadanaka Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11030076A priority Critical patent/JPS5335475A/en
Publication of JPS5335475A publication Critical patent/JPS5335475A/en
Pending legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: After a negative photosensitive resin film or a high-polymer film and an Al film are formed on a positive photosensitive resin film which is applied on a semiconductor substrate, the positive resin is subjected to patterning to reduce the side each of the positive resin, thereby obtaining a minute metallic wiring with a good yield.
COPYRIGHT: (C)1978,JPO&Japio
JP11030076A 1976-09-14 1976-09-14 Production of semiconductor unit Pending JPS5335475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11030076A JPS5335475A (en) 1976-09-14 1976-09-14 Production of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11030076A JPS5335475A (en) 1976-09-14 1976-09-14 Production of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5335475A true JPS5335475A (en) 1978-04-01

Family

ID=14532194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11030076A Pending JPS5335475A (en) 1976-09-14 1976-09-14 Production of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5335475A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574127A (en) * 1980-06-10 1982-01-09 Fujitsu Ltd Formation of conductor pattern
US5049972A (en) * 1988-01-29 1991-09-17 Hitachi, Ltd. Method of manufacturing semiconductor integrated circuit device
US5223454A (en) * 1988-01-29 1993-06-29 Hitachi, Ltd. Method of manufacturing semiconductor integrated circuit device
US5854097A (en) * 1989-09-09 1998-12-29 Canon Kabushiki Kaisha Method of manufacturing a semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS574127A (en) * 1980-06-10 1982-01-09 Fujitsu Ltd Formation of conductor pattern
US5049972A (en) * 1988-01-29 1991-09-17 Hitachi, Ltd. Method of manufacturing semiconductor integrated circuit device
US5223454A (en) * 1988-01-29 1993-06-29 Hitachi, Ltd. Method of manufacturing semiconductor integrated circuit device
US5854097A (en) * 1989-09-09 1998-12-29 Canon Kabushiki Kaisha Method of manufacturing a semiconductor device

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