JPS5412587A - Warpage reducing method of lithium tantalate single crystal wafers - Google Patents
Warpage reducing method of lithium tantalate single crystal wafersInfo
- Publication number
- JPS5412587A JPS5412587A JP7712877A JP7712877A JPS5412587A JP S5412587 A JPS5412587 A JP S5412587A JP 7712877 A JP7712877 A JP 7712877A JP 7712877 A JP7712877 A JP 7712877A JP S5412587 A JPS5412587 A JP S5412587A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- lithium tantalate
- tantalate single
- reducing method
- crystal wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce warpage and increase the yield of products by heat-treating a lithium tantalate single crystal wafer at a specified temperature.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7712877A JPS5412587A (en) | 1977-06-30 | 1977-06-30 | Warpage reducing method of lithium tantalate single crystal wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7712877A JPS5412587A (en) | 1977-06-30 | 1977-06-30 | Warpage reducing method of lithium tantalate single crystal wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5412587A true JPS5412587A (en) | 1979-01-30 |
Family
ID=13625149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7712877A Pending JPS5412587A (en) | 1977-06-30 | 1977-06-30 | Warpage reducing method of lithium tantalate single crystal wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5412587A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6348094B1 (en) * | 1999-03-18 | 2002-02-19 | Shin-Etsu Chemical Co., Ltd. | SAW or LSAW device piezoelectric single crystal wafer and method of making |
EP1518947A2 (en) * | 2003-09-26 | 2005-03-30 | Shin-Etsu Chemical Co., Ltd. | Method of producing single-polarized lithium tantalate crystal and crystal thereby obtained. |
US7323050B2 (en) | 2003-03-06 | 2008-01-29 | Shin-Etsu Chemical Co., Ltd. | Method of producing lithium tantalate crystal |
-
1977
- 1977-06-30 JP JP7712877A patent/JPS5412587A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6348094B1 (en) * | 1999-03-18 | 2002-02-19 | Shin-Etsu Chemical Co., Ltd. | SAW or LSAW device piezoelectric single crystal wafer and method of making |
US7323050B2 (en) | 2003-03-06 | 2008-01-29 | Shin-Etsu Chemical Co., Ltd. | Method of producing lithium tantalate crystal |
EP1518947A2 (en) * | 2003-09-26 | 2005-03-30 | Shin-Etsu Chemical Co., Ltd. | Method of producing single-polarized lithium tantalate crystal and crystal thereby obtained. |
EP1518947A3 (en) * | 2003-09-26 | 2007-03-07 | Shin-Etsu Chemical Co., Ltd. | Method of producing single-polarized lithium tantalate crystal and crystal thereby obtained. |
US7374612B2 (en) | 2003-09-26 | 2008-05-20 | Shin-Etsu Chemical Co., Ltd. | Method of producing single-polarized lithium tantalate crystal and single-polarized lithium tantalate crystal |
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