JPS53103382A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53103382A JPS53103382A JP1830977A JP1830977A JPS53103382A JP S53103382 A JPS53103382 A JP S53103382A JP 1830977 A JP1830977 A JP 1830977A JP 1830977 A JP1830977 A JP 1830977A JP S53103382 A JPS53103382 A JP S53103382A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- time
- wafer
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
PURPOSE: To release stress at the time of forming plated heat sinks, reduce warpage at the time working a wafer thinly and achieve the increase in yield by beforehand forming recesses in the wafer surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52018309A JPS5921194B2 (en) | 1977-02-21 | 1977-02-21 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52018309A JPS5921194B2 (en) | 1977-02-21 | 1977-02-21 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53103382A true JPS53103382A (en) | 1978-09-08 |
JPS5921194B2 JPS5921194B2 (en) | 1984-05-18 |
Family
ID=11968004
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52018309A Expired JPS5921194B2 (en) | 1977-02-21 | 1977-02-21 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5921194B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63122179A (en) * | 1986-11-11 | 1988-05-26 | Semiconductor Res Found | Manufacture of ultrahigh-frequency semiconductor device and ultrahigh-frequency oscillator |
-
1977
- 1977-02-21 JP JP52018309A patent/JPS5921194B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63122179A (en) * | 1986-11-11 | 1988-05-26 | Semiconductor Res Found | Manufacture of ultrahigh-frequency semiconductor device and ultrahigh-frequency oscillator |
Also Published As
Publication number | Publication date |
---|---|
JPS5921194B2 (en) | 1984-05-18 |
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