JPS52101991A - Preparation of silicon target - Google Patents

Preparation of silicon target

Info

Publication number
JPS52101991A
JPS52101991A JP1843676A JP1843676A JPS52101991A JP S52101991 A JPS52101991 A JP S52101991A JP 1843676 A JP1843676 A JP 1843676A JP 1843676 A JP1843676 A JP 1843676A JP S52101991 A JPS52101991 A JP S52101991A
Authority
JP
Japan
Prior art keywords
preparation
silicon target
transparent substrate
photoconductive film
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1843676A
Other languages
Japanese (ja)
Other versions
JPS5847874B2 (en
Inventor
Mitsuo Sugama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP51018436A priority Critical patent/JPS5847874B2/en
Publication of JPS52101991A publication Critical patent/JPS52101991A/en
Publication of JPS5847874B2 publication Critical patent/JPS5847874B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To improve yield and efficiency at manufacturing, by treating a photoconductive film and a transparent substrate together during manufacturing process, by forming the photoconductive film directly on the transparent substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP51018436A 1976-02-24 1976-02-24 Manufacturing method of silicon target Expired JPS5847874B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51018436A JPS5847874B2 (en) 1976-02-24 1976-02-24 Manufacturing method of silicon target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51018436A JPS5847874B2 (en) 1976-02-24 1976-02-24 Manufacturing method of silicon target

Publications (2)

Publication Number Publication Date
JPS52101991A true JPS52101991A (en) 1977-08-26
JPS5847874B2 JPS5847874B2 (en) 1983-10-25

Family

ID=11971585

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51018436A Expired JPS5847874B2 (en) 1976-02-24 1976-02-24 Manufacturing method of silicon target

Country Status (1)

Country Link
JP (1) JPS5847874B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6140341U (en) * 1984-08-17 1986-03-14 株式会社ミツプス Separable roll continuous bag
JPH0356970U (en) * 1989-10-09 1991-05-31

Also Published As

Publication number Publication date
JPS5847874B2 (en) 1983-10-25

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