JPS52109865A - Inpurity adding method to silicon - Google Patents
Inpurity adding method to siliconInfo
- Publication number
- JPS52109865A JPS52109865A JP2613076A JP2613076A JPS52109865A JP S52109865 A JPS52109865 A JP S52109865A JP 2613076 A JP2613076 A JP 2613076A JP 2613076 A JP2613076 A JP 2613076A JP S52109865 A JPS52109865 A JP S52109865A
- Authority
- JP
- Japan
- Prior art keywords
- inpurity
- silicon
- adding method
- semiconductor
- thru
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain P type Si semiconductor having the desired resistivity, by radiating high speed neutron to the semiconductor Si mono crystal, converting a part of Si into Al with the nuclear reaction, and annealing at the temperatures of 700 thru 800°C for one hour.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2613076A JPS52109865A (en) | 1976-03-12 | 1976-03-12 | Inpurity adding method to silicon |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2613076A JPS52109865A (en) | 1976-03-12 | 1976-03-12 | Inpurity adding method to silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52109865A true JPS52109865A (en) | 1977-09-14 |
JPS5328741B2 JPS5328741B2 (en) | 1978-08-16 |
Family
ID=12184970
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2613076A Granted JPS52109865A (en) | 1976-03-12 | 1976-03-12 | Inpurity adding method to silicon |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52109865A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5081262A (en) * | 1973-11-12 | 1975-07-01 | ||
JPS5094879A (en) * | 1973-12-14 | 1975-07-28 |
-
1976
- 1976-03-12 JP JP2613076A patent/JPS52109865A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5081262A (en) * | 1973-11-12 | 1975-07-01 | ||
JPS5094879A (en) * | 1973-12-14 | 1975-07-28 |
Also Published As
Publication number | Publication date |
---|---|
JPS5328741B2 (en) | 1978-08-16 |
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