JPS53109474A - Manufacture for silicon water - Google Patents

Manufacture for silicon water

Info

Publication number
JPS53109474A
JPS53109474A JP2384677A JP2384677A JPS53109474A JP S53109474 A JPS53109474 A JP S53109474A JP 2384677 A JP2384677 A JP 2384677A JP 2384677 A JP2384677 A JP 2384677A JP S53109474 A JPS53109474 A JP S53109474A
Authority
JP
Japan
Prior art keywords
manufacture
silicon water
type
uniformed
neutron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2384677A
Other languages
Japanese (ja)
Inventor
Hiroshi Tamura
Hiroo Usui
Yasuo Wada
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2384677A priority Critical patent/JPS53109474A/en
Publication of JPS53109474A publication Critical patent/JPS53109474A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Abstract

PURPOSE: To obtain the Si substrate suitable for manufacture of IC and LSI, by introducing N or P type impurity ion on the Si substrate surface of high resistivity type the impurity distribution of which is uniformed by radiating neutron, and by achieving desired and uniform specific resistivity.
COPYRIGHT: (C)1978,JPO&Japio
JP2384677A 1977-03-07 1977-03-07 Manufacture for silicon water Pending JPS53109474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2384677A JPS53109474A (en) 1977-03-07 1977-03-07 Manufacture for silicon water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2384677A JPS53109474A (en) 1977-03-07 1977-03-07 Manufacture for silicon water

Publications (1)

Publication Number Publication Date
JPS53109474A true JPS53109474A (en) 1978-09-25

Family

ID=12121759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2384677A Pending JPS53109474A (en) 1977-03-07 1977-03-07 Manufacture for silicon water

Country Status (1)

Country Link
JP (1) JPS53109474A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112364A (en) * 1985-11-12 1987-05-23 Sony Corp Manufacture of solid-state image pickup device
JPS62112365A (en) * 1985-11-12 1987-05-23 Sony Corp Manufacture of solid-state image pickup device
JPS62112363A (en) * 1985-11-12 1987-05-23 Sony Corp Solid-state image pickup device
JP2016111357A (en) * 2014-12-09 2016-06-20 三菱電機株式会社 Solar battery, solar battery module, and method of manufacturing solar battery

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62112364A (en) * 1985-11-12 1987-05-23 Sony Corp Manufacture of solid-state image pickup device
JPS62112365A (en) * 1985-11-12 1987-05-23 Sony Corp Manufacture of solid-state image pickup device
JPS62112363A (en) * 1985-11-12 1987-05-23 Sony Corp Solid-state image pickup device
JP2016111357A (en) * 2014-12-09 2016-06-20 三菱電機株式会社 Solar battery, solar battery module, and method of manufacturing solar battery

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