JPS532075A - Appraisal method for semiconductor crystal - Google Patents
Appraisal method for semiconductor crystalInfo
- Publication number
- JPS532075A JPS532075A JP7607276A JP7607276A JPS532075A JP S532075 A JPS532075 A JP S532075A JP 7607276 A JP7607276 A JP 7607276A JP 7607276 A JP7607276 A JP 7607276A JP S532075 A JPS532075 A JP S532075A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor crystal
- appraisal method
- appraisal
- actual
- oxidation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 230000003647 oxidation Effects 0.000 abstract 2
- 238000007254 oxidation reaction Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 1
- 238000007669 thermal treatment Methods 0.000 abstract 1
Abstract
PURPOSE: To have an appraisal for the substrate crystal by performing a thermal treatment in N2 equivalent to an actual treatment for 10W2 hours instead of only one oxidation and further having another oxidation in order to secure a resemblance to the actual operaton as much as possible.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7607276A JPS532075A (en) | 1976-06-29 | 1976-06-29 | Appraisal method for semiconductor crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7607276A JPS532075A (en) | 1976-06-29 | 1976-06-29 | Appraisal method for semiconductor crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS532075A true JPS532075A (en) | 1978-01-10 |
Family
ID=13594583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7607276A Pending JPS532075A (en) | 1976-06-29 | 1976-06-29 | Appraisal method for semiconductor crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS532075A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5654109A (en) * | 1979-10-09 | 1981-05-14 | Matsushita Electric Ind Co Ltd | Direct current control circuit |
JPS62161009A (en) * | 1985-11-15 | 1987-07-17 | View Eng | Device and method of measuring dimensional shape of cylindrical object |
-
1976
- 1976-06-29 JP JP7607276A patent/JPS532075A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5654109A (en) * | 1979-10-09 | 1981-05-14 | Matsushita Electric Ind Co Ltd | Direct current control circuit |
JPS6228887B2 (en) * | 1979-10-09 | 1987-06-23 | Matsushita Electric Ind Co Ltd | |
JPS62161009A (en) * | 1985-11-15 | 1987-07-17 | View Eng | Device and method of measuring dimensional shape of cylindrical object |
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