JPS532075A - Appraisal method for semiconductor crystal - Google Patents

Appraisal method for semiconductor crystal

Info

Publication number
JPS532075A
JPS532075A JP7607276A JP7607276A JPS532075A JP S532075 A JPS532075 A JP S532075A JP 7607276 A JP7607276 A JP 7607276A JP 7607276 A JP7607276 A JP 7607276A JP S532075 A JPS532075 A JP S532075A
Authority
JP
Japan
Prior art keywords
appraisal
semiconductor crystal
actual
oxidation
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7607276A
Other languages
Japanese (ja)
Inventor
Masamichi Yoshida
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7607276A priority Critical patent/JPS532075A/en
Publication of JPS532075A publication Critical patent/JPS532075A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To have an appraisal for the substrate crystal by performing a thermal treatment in N2 equivalent to an actual treatment for 10W2 hours instead of only one oxidation and further having another oxidation in order to secure a resemblance to the actual operaton as much as possible.
COPYRIGHT: (C)1978,JPO&Japio
JP7607276A 1976-06-29 1976-06-29 Appraisal method for semiconductor crystal Pending JPS532075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7607276A JPS532075A (en) 1976-06-29 1976-06-29 Appraisal method for semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7607276A JPS532075A (en) 1976-06-29 1976-06-29 Appraisal method for semiconductor crystal

Publications (1)

Publication Number Publication Date
JPS532075A true JPS532075A (en) 1978-01-10

Family

ID=13594583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7607276A Pending JPS532075A (en) 1976-06-29 1976-06-29 Appraisal method for semiconductor crystal

Country Status (1)

Country Link
JP (1) JPS532075A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654109A (en) * 1979-10-09 1981-05-14 Matsushita Electric Ind Co Ltd Direct current control circuit
JPS62161009A (en) * 1985-11-15 1987-07-17 View Eng Device and method of measuring dimensional shape of cylindrical object

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5654109A (en) * 1979-10-09 1981-05-14 Matsushita Electric Ind Co Ltd Direct current control circuit
JPS6228887B2 (en) * 1979-10-09 1987-06-23 Matsushita Electric Ind Co Ltd
JPS62161009A (en) * 1985-11-15 1987-07-17 View Eng Device and method of measuring dimensional shape of cylindrical object

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