JPS5361267A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5361267A
JPS5361267A JP13629976A JP13629976A JPS5361267A JP S5361267 A JPS5361267 A JP S5361267A JP 13629976 A JP13629976 A JP 13629976A JP 13629976 A JP13629976 A JP 13629976A JP S5361267 A JPS5361267 A JP S5361267A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wafer
wafers
cracking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13629976A
Other languages
Japanese (ja)
Inventor
Tsunao Tsukikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13629976A priority Critical patent/JPS5361267A/en
Publication of JPS5361267A publication Critical patent/JPS5361267A/en
Pending legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)

Abstract

PURPOSE: To prevent the cracking of wafers during treatment process by forming dicing grooves in wafers in a state of supporting the wafer to become a production substrate with other wafer and making inspection.
COPYRIGHT: (C)1978,JPO&Japio
JP13629976A 1976-11-15 1976-11-15 Production of semiconductor device Pending JPS5361267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13629976A JPS5361267A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13629976A JPS5361267A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5361267A true JPS5361267A (en) 1978-06-01

Family

ID=15171926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13629976A Pending JPS5361267A (en) 1976-11-15 1976-11-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5361267A (en)

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