JPS5244163A - Process for productin of semiconductor element - Google Patents

Process for productin of semiconductor element

Info

Publication number
JPS5244163A
JPS5244163A JP11885175A JP11885175A JPS5244163A JP S5244163 A JPS5244163 A JP S5244163A JP 11885175 A JP11885175 A JP 11885175A JP 11885175 A JP11885175 A JP 11885175A JP S5244163 A JPS5244163 A JP S5244163A
Authority
JP
Japan
Prior art keywords
productin
semiconductor element
wafer
repeat
junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11885175A
Other languages
Japanese (ja)
Inventor
Tadanobu Hayashi
Sadao Okano
Koichi Wajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11885175A priority Critical patent/JPS5244163A/en
Publication of JPS5244163A publication Critical patent/JPS5244163A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To repeat impurity diffusion and removal of diffusion layer on the surface of a wafer having been formed with a Pn junction thereby obtaining a desired lifetime.
COPYRIGHT: (C)1977,JPO&Japio
JP11885175A 1975-10-03 1975-10-03 Process for productin of semiconductor element Pending JPS5244163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11885175A JPS5244163A (en) 1975-10-03 1975-10-03 Process for productin of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11885175A JPS5244163A (en) 1975-10-03 1975-10-03 Process for productin of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5244163A true JPS5244163A (en) 1977-04-06

Family

ID=14746698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11885175A Pending JPS5244163A (en) 1975-10-03 1975-10-03 Process for productin of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5244163A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466014A2 (en) * 1990-07-05 1992-01-15 Kabushiki Kaisha Toshiba External gettering during manufacture of semiconductor devices
US8329563B2 (en) 2006-02-24 2012-12-11 Mitsubishi Denki Kabushiki Kaisha Semiconductor device including a gettering layer and manufacturing method therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023978A (en) * 1973-07-02 1975-03-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5023978A (en) * 1973-07-02 1975-03-14

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0466014A2 (en) * 1990-07-05 1992-01-15 Kabushiki Kaisha Toshiba External gettering during manufacture of semiconductor devices
JPH04218921A (en) * 1990-07-05 1992-08-10 Toshiba Corp Manufacture of semiconductor device
US8329563B2 (en) 2006-02-24 2012-12-11 Mitsubishi Denki Kabushiki Kaisha Semiconductor device including a gettering layer and manufacturing method therefor
JP5151975B2 (en) * 2006-02-24 2013-02-27 三菱電機株式会社 Manufacturing method of semiconductor device

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