JPS52116079A - Heat treatment of semiconductor device - Google Patents

Heat treatment of semiconductor device

Info

Publication number
JPS52116079A
JPS52116079A JP3255776A JP3255776A JPS52116079A JP S52116079 A JPS52116079 A JP S52116079A JP 3255776 A JP3255776 A JP 3255776A JP 3255776 A JP3255776 A JP 3255776A JP S52116079 A JPS52116079 A JP S52116079A
Authority
JP
Japan
Prior art keywords
semiconductor device
heat treatment
wafer
heavymetals
gettering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3255776A
Other languages
Japanese (ja)
Inventor
Manabu Matsuzawa
Morisaku Yoshida
Takeshi Uryu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3255776A priority Critical patent/JPS52116079A/en
Publication of JPS52116079A publication Critical patent/JPS52116079A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To obtain a semiconductor device of high performance which is highly reliable and provides less leak currents and noises by forming N type layer on Si wafer having the PN junction by P diffusion followed by heat treatment so as to remove heavymetals in the wafer by gettering.
COPYRIGHT: (C)1977,JPO&Japio
JP3255776A 1976-03-26 1976-03-26 Heat treatment of semiconductor device Pending JPS52116079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3255776A JPS52116079A (en) 1976-03-26 1976-03-26 Heat treatment of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3255776A JPS52116079A (en) 1976-03-26 1976-03-26 Heat treatment of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52116079A true JPS52116079A (en) 1977-09-29

Family

ID=12362202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3255776A Pending JPS52116079A (en) 1976-03-26 1976-03-26 Heat treatment of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52116079A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827330A1 (en) 1978-06-22 1980-01-03 Itt Ind Gmbh Deutsche Redn. of broadband noise from semiconductor elements - by subjecting doped elements to controlled heat treatment in nitrogen
US6562733B2 (en) 1997-09-30 2003-05-13 Nec Corporation Semiconductor device manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827330A1 (en) 1978-06-22 1980-01-03 Itt Ind Gmbh Deutsche Redn. of broadband noise from semiconductor elements - by subjecting doped elements to controlled heat treatment in nitrogen
US6562733B2 (en) 1997-09-30 2003-05-13 Nec Corporation Semiconductor device manufacturing method

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