JPS51115777A - Manufacturing method of a semiconductor apparatus - Google Patents
Manufacturing method of a semiconductor apparatusInfo
- Publication number
- JPS51115777A JPS51115777A JP3547475A JP3547475A JPS51115777A JP S51115777 A JPS51115777 A JP S51115777A JP 3547475 A JP3547475 A JP 3547475A JP 3547475 A JP3547475 A JP 3547475A JP S51115777 A JPS51115777 A JP S51115777A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor apparatus
- manufacturing
- cracking
- wafer
- low cost
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: High withstand voltage semiconductor apparatus, without cracking of a wafer, with good available percentage and with low cost.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3547475A JPS5851413B2 (en) | 1975-03-26 | 1975-03-26 | Handout Taisouchino Seizouhouhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3547475A JPS5851413B2 (en) | 1975-03-26 | 1975-03-26 | Handout Taisouchino Seizouhouhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51115777A true JPS51115777A (en) | 1976-10-12 |
JPS5851413B2 JPS5851413B2 (en) | 1983-11-16 |
Family
ID=12442761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3547475A Expired JPS5851413B2 (en) | 1975-03-26 | 1975-03-26 | Handout Taisouchino Seizouhouhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5851413B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5742146A (en) * | 1980-08-27 | 1982-03-09 | Nec Corp | Manufacture of semiconductor device |
JP2013161888A (en) * | 2012-02-02 | 2013-08-19 | Shindengen Electric Mfg Co Ltd | Mesa type semiconductor element manufacturing method |
-
1975
- 1975-03-26 JP JP3547475A patent/JPS5851413B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5742146A (en) * | 1980-08-27 | 1982-03-09 | Nec Corp | Manufacture of semiconductor device |
JP2013161888A (en) * | 2012-02-02 | 2013-08-19 | Shindengen Electric Mfg Co Ltd | Mesa type semiconductor element manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JPS5851413B2 (en) | 1983-11-16 |
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