JPS51126083A - Manufacturing method of semi-conductor equpment - Google Patents

Manufacturing method of semi-conductor equpment

Info

Publication number
JPS51126083A
JPS51126083A JP4969775A JP4969775A JPS51126083A JP S51126083 A JPS51126083 A JP S51126083A JP 4969775 A JP4969775 A JP 4969775A JP 4969775 A JP4969775 A JP 4969775A JP S51126083 A JPS51126083 A JP S51126083A
Authority
JP
Japan
Prior art keywords
semi
conductor
equpment
manufacturing
lessen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4969775A
Other languages
Japanese (ja)
Inventor
Katsuhiko Ito
Sumio Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4969775A priority Critical patent/JPS51126083A/en
Publication of JPS51126083A publication Critical patent/JPS51126083A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: On the semi-conductor equipment which protects leak current yielding to the semi-conductor base plate and lessen the masking process.
COPYRIGHT: (C)1976,JPO&Japio
JP4969775A 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment Pending JPS51126083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4969775A JPS51126083A (en) 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4969775A JPS51126083A (en) 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment

Publications (1)

Publication Number Publication Date
JPS51126083A true JPS51126083A (en) 1976-11-02

Family

ID=12838360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4969775A Pending JPS51126083A (en) 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment

Country Status (1)

Country Link
JP (1) JPS51126083A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736842A (en) * 1980-08-15 1982-02-27 Hitachi Ltd Semiconductor integrated circuit device
JPS5817634A (en) * 1981-07-24 1983-02-01 Hitachi Ltd Manufacture of semiconductor device
JPS6185869A (en) * 1984-10-04 1986-05-01 Nec Corp Manufacture of semiconductor device
JPS62104158A (en) * 1985-10-31 1987-05-14 Nec Corp Semiconductor integrated circuit device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5736842A (en) * 1980-08-15 1982-02-27 Hitachi Ltd Semiconductor integrated circuit device
JPS5817634A (en) * 1981-07-24 1983-02-01 Hitachi Ltd Manufacture of semiconductor device
JPS6185869A (en) * 1984-10-04 1986-05-01 Nec Corp Manufacture of semiconductor device
JPH053149B2 (en) * 1984-10-04 1993-01-14 Nippon Electric Co
JPS62104158A (en) * 1985-10-31 1987-05-14 Nec Corp Semiconductor integrated circuit device

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