JPS51132085A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS51132085A
JPS51132085A JP50056307A JP5630775A JPS51132085A JP S51132085 A JPS51132085 A JP S51132085A JP 50056307 A JP50056307 A JP 50056307A JP 5630775 A JP5630775 A JP 5630775A JP S51132085 A JPS51132085 A JP S51132085A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor device
pattern
processings
arranging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50056307A
Other languages
Japanese (ja)
Inventor
Kimio Yanagida
Yasutaka Ban
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50056307A priority Critical patent/JPS51132085A/en
Publication of JPS51132085A publication Critical patent/JPS51132085A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form a correct pattern by arranging a cover film which has an appointed pattern of stage difference on the surface of a semiconductor base plate and is made of the material that is resistible against a various kind of processings.
COPYRIGHT: (C)1976,JPO&Japio
JP50056307A 1975-05-12 1975-05-12 Manufacturing method of semiconductor device Pending JPS51132085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50056307A JPS51132085A (en) 1975-05-12 1975-05-12 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50056307A JPS51132085A (en) 1975-05-12 1975-05-12 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51132085A true JPS51132085A (en) 1976-11-16

Family

ID=13023474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50056307A Pending JPS51132085A (en) 1975-05-12 1975-05-12 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51132085A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186334A (en) * 1981-05-04 1982-11-16 Fairchild Camera Instr Co Matching mark in electron beam drawing system
JPS58128A (en) * 1981-06-11 1983-01-05 ウエスタ−ン・エレクトリツク・カムパニ−・インコ−ポレ−テツド Method of producing integrated circuit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186334A (en) * 1981-05-04 1982-11-16 Fairchild Camera Instr Co Matching mark in electron beam drawing system
JPH0363207B2 (en) * 1981-05-04 1991-09-30 Fueachairudo Kamera Endo Insutsurumento Corp
JPS58128A (en) * 1981-06-11 1983-01-05 ウエスタ−ン・エレクトリツク・カムパニ−・インコ−ポレ−テツド Method of producing integrated circuit

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