JPS5258474A - Flattening treatment of substrate sufaces - Google Patents
Flattening treatment of substrate sufacesInfo
- Publication number
- JPS5258474A JPS5258474A JP13404875A JP13404875A JPS5258474A JP S5258474 A JPS5258474 A JP S5258474A JP 13404875 A JP13404875 A JP 13404875A JP 13404875 A JP13404875 A JP 13404875A JP S5258474 A JPS5258474 A JP S5258474A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sufaces
- recess
- flattening treatment
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
- Weting (AREA)
Abstract
PURPOSE: To flatten the surface of a semiconductor substrate having a recess or the surface of the epitaxial layer having a recess grown on the substrate having a recess, without causing crystal defects, by forming a film on the entire surface and leaving this film only in the recess through etching, then etching the substrate, at the time of flattening the surface.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13404875A JPS5258474A (en) | 1975-11-10 | 1975-11-10 | Flattening treatment of substrate sufaces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13404875A JPS5258474A (en) | 1975-11-10 | 1975-11-10 | Flattening treatment of substrate sufaces |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258474A true JPS5258474A (en) | 1977-05-13 |
Family
ID=15119133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13404875A Pending JPS5258474A (en) | 1975-11-10 | 1975-11-10 | Flattening treatment of substrate sufaces |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258474A (en) |
-
1975
- 1975-11-10 JP JP13404875A patent/JPS5258474A/en active Pending
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