JPS5258474A - Flattening treatment of substrate sufaces - Google Patents

Flattening treatment of substrate sufaces

Info

Publication number
JPS5258474A
JPS5258474A JP13404875A JP13404875A JPS5258474A JP S5258474 A JPS5258474 A JP S5258474A JP 13404875 A JP13404875 A JP 13404875A JP 13404875 A JP13404875 A JP 13404875A JP S5258474 A JPS5258474 A JP S5258474A
Authority
JP
Japan
Prior art keywords
substrate
sufaces
recess
flattening treatment
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13404875A
Other languages
Japanese (ja)
Inventor
Kaoru Niino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13404875A priority Critical patent/JPS5258474A/en
Publication of JPS5258474A publication Critical patent/JPS5258474A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To flatten the surface of a semiconductor substrate having a recess or the surface of the epitaxial layer having a recess grown on the substrate having a recess, without causing crystal defects, by forming a film on the entire surface and leaving this film only in the recess through etching, then etching the substrate, at the time of flattening the surface.
COPYRIGHT: (C)1977,JPO&Japio
JP13404875A 1975-11-10 1975-11-10 Flattening treatment of substrate sufaces Pending JPS5258474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13404875A JPS5258474A (en) 1975-11-10 1975-11-10 Flattening treatment of substrate sufaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13404875A JPS5258474A (en) 1975-11-10 1975-11-10 Flattening treatment of substrate sufaces

Publications (1)

Publication Number Publication Date
JPS5258474A true JPS5258474A (en) 1977-05-13

Family

ID=15119133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13404875A Pending JPS5258474A (en) 1975-11-10 1975-11-10 Flattening treatment of substrate sufaces

Country Status (1)

Country Link
JP (1) JPS5258474A (en)

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