JPS538073A - Mis type semiconductor device - Google Patents
Mis type semiconductor deviceInfo
- Publication number
- JPS538073A JPS538073A JP8198376A JP8198376A JPS538073A JP S538073 A JPS538073 A JP S538073A JP 8198376 A JP8198376 A JP 8198376A JP 8198376 A JP8198376 A JP 8198376A JP S538073 A JPS538073 A JP S538073A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- type semiconductor
- mis type
- ions
- psg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
Abstract
PURPOSE: To prevent the deep diffusion of P ions into substrate and prevent contamination of ions belonging to Na as well by forming films such as Si3N4, alumina, low concentration PSG, etc. under a PSG film of a high concentration.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8198376A JPS6011473B2 (en) | 1976-07-12 | 1976-07-12 | MIS type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8198376A JPS6011473B2 (en) | 1976-07-12 | 1976-07-12 | MIS type semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS538073A true JPS538073A (en) | 1978-01-25 |
JPS6011473B2 JPS6011473B2 (en) | 1985-03-26 |
Family
ID=13761705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8198376A Expired JPS6011473B2 (en) | 1976-07-12 | 1976-07-12 | MIS type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6011473B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5715700A (en) * | 1980-06-26 | 1982-01-27 | Manabu Fukuda | Rotary perforation forming device |
JPS59115571A (en) * | 1982-12-23 | 1984-07-04 | Yoshiro Odaka | Method and device for collecting emitted light energy by lens |
JPS62271694A (en) * | 1986-05-16 | 1987-11-25 | ユニチカ株式会社 | Cutter |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6324874U (en) * | 1986-07-31 | 1988-02-18 |
-
1976
- 1976-07-12 JP JP8198376A patent/JPS6011473B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5715700A (en) * | 1980-06-26 | 1982-01-27 | Manabu Fukuda | Rotary perforation forming device |
JPS59115571A (en) * | 1982-12-23 | 1984-07-04 | Yoshiro Odaka | Method and device for collecting emitted light energy by lens |
JPS62271694A (en) * | 1986-05-16 | 1987-11-25 | ユニチカ株式会社 | Cutter |
Also Published As
Publication number | Publication date |
---|---|
JPS6011473B2 (en) | 1985-03-26 |
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