JPS51118960A - Wafer form semiconductor doping material - Google Patents

Wafer form semiconductor doping material

Info

Publication number
JPS51118960A
JPS51118960A JP4411675A JP4411675A JPS51118960A JP S51118960 A JPS51118960 A JP S51118960A JP 4411675 A JP4411675 A JP 4411675A JP 4411675 A JP4411675 A JP 4411675A JP S51118960 A JPS51118960 A JP S51118960A
Authority
JP
Japan
Prior art keywords
doping material
form semiconductor
wafer form
semiconductor doping
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4411675A
Other languages
Japanese (ja)
Inventor
Koreaki Gunjikake
Masashi Hasegawa
Hiroshi Oizumi
Yoshio Ogata
Hitoshi Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP4411675A priority Critical patent/JPS51118960A/en
Publication of JPS51118960A publication Critical patent/JPS51118960A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To get wafer form semiconductor doping material which can be used for a long time repeatedly for the diffusion of phosphate between a low concentration and a high concentration in the stable phosphate concentration.
COPYRIGHT: (C)1976,JPO&Japio
JP4411675A 1975-04-11 1975-04-11 Wafer form semiconductor doping material Pending JPS51118960A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4411675A JPS51118960A (en) 1975-04-11 1975-04-11 Wafer form semiconductor doping material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4411675A JPS51118960A (en) 1975-04-11 1975-04-11 Wafer form semiconductor doping material

Publications (1)

Publication Number Publication Date
JPS51118960A true JPS51118960A (en) 1976-10-19

Family

ID=12682622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4411675A Pending JPS51118960A (en) 1975-04-11 1975-04-11 Wafer form semiconductor doping material

Country Status (1)

Country Link
JP (1) JPS51118960A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2419922A1 (en) * 1978-03-16 1979-10-12 Owens Illinois Inc POLYCRYSTALLINE CERAMICS FORMED FROM MELTED MASSES AND DOPING HOSTS CONTAINING PHOSPHORUS

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039060A (en) * 1973-06-28 1975-04-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5039060A (en) * 1973-06-28 1975-04-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2419922A1 (en) * 1978-03-16 1979-10-12 Owens Illinois Inc POLYCRYSTALLINE CERAMICS FORMED FROM MELTED MASSES AND DOPING HOSTS CONTAINING PHOSPHORUS

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