JPS51118960A - Wafer form semiconductor doping material - Google Patents
Wafer form semiconductor doping materialInfo
- Publication number
- JPS51118960A JPS51118960A JP4411675A JP4411675A JPS51118960A JP S51118960 A JPS51118960 A JP S51118960A JP 4411675 A JP4411675 A JP 4411675A JP 4411675 A JP4411675 A JP 4411675A JP S51118960 A JPS51118960 A JP S51118960A
- Authority
- JP
- Japan
- Prior art keywords
- doping material
- form semiconductor
- wafer form
- semiconductor doping
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To get wafer form semiconductor doping material which can be used for a long time repeatedly for the diffusion of phosphate between a low concentration and a high concentration in the stable phosphate concentration.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4411675A JPS51118960A (en) | 1975-04-11 | 1975-04-11 | Wafer form semiconductor doping material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4411675A JPS51118960A (en) | 1975-04-11 | 1975-04-11 | Wafer form semiconductor doping material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51118960A true JPS51118960A (en) | 1976-10-19 |
Family
ID=12682622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4411675A Pending JPS51118960A (en) | 1975-04-11 | 1975-04-11 | Wafer form semiconductor doping material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51118960A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2419922A1 (en) * | 1978-03-16 | 1979-10-12 | Owens Illinois Inc | POLYCRYSTALLINE CERAMICS FORMED FROM MELTED MASSES AND DOPING HOSTS CONTAINING PHOSPHORUS |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5039060A (en) * | 1973-06-28 | 1975-04-10 |
-
1975
- 1975-04-11 JP JP4411675A patent/JPS51118960A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5039060A (en) * | 1973-06-28 | 1975-04-10 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2419922A1 (en) * | 1978-03-16 | 1979-10-12 | Owens Illinois Inc | POLYCRYSTALLINE CERAMICS FORMED FROM MELTED MASSES AND DOPING HOSTS CONTAINING PHOSPHORUS |
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