JPS53139985A - Production of mis type transistors - Google Patents

Production of mis type transistors

Info

Publication number
JPS53139985A
JPS53139985A JP5501977A JP5501977A JPS53139985A JP S53139985 A JPS53139985 A JP S53139985A JP 5501977 A JP5501977 A JP 5501977A JP 5501977 A JP5501977 A JP 5501977A JP S53139985 A JPS53139985 A JP S53139985A
Authority
JP
Japan
Prior art keywords
production
type transistors
mis type
source
drain regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5501977A
Other languages
Japanese (ja)
Inventor
Yasuhisa Omura
Kuniki Owada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5501977A priority Critical patent/JPS53139985A/en
Publication of JPS53139985A publication Critical patent/JPS53139985A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To reduce overlapping of gate electrodes for source and drain regions with a simple process by using a polycrystalline Si layer which becomes gate celctrodes, as a mask, and implanting ions to both sides thereof thereby forming the source and drain regions.
COPYRIGHT: (C)1978,JPO&Japio
JP5501977A 1977-05-13 1977-05-13 Production of mis type transistors Pending JPS53139985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5501977A JPS53139985A (en) 1977-05-13 1977-05-13 Production of mis type transistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5501977A JPS53139985A (en) 1977-05-13 1977-05-13 Production of mis type transistors

Publications (1)

Publication Number Publication Date
JPS53139985A true JPS53139985A (en) 1978-12-06

Family

ID=12986944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5501977A Pending JPS53139985A (en) 1977-05-13 1977-05-13 Production of mis type transistors

Country Status (1)

Country Link
JP (1) JPS53139985A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671977A (en) * 1979-11-19 1981-06-15 Fujitsu Ltd Preparation method of mis electric field effect semiconductor system
JPS5671973A (en) * 1979-11-16 1981-06-15 Nec Corp Preparation method of semiconductor system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671973A (en) * 1979-11-16 1981-06-15 Nec Corp Preparation method of semiconductor system
JPH0442833B2 (en) * 1979-11-16 1992-07-14 Nippon Electric Co
JPS5671977A (en) * 1979-11-19 1981-06-15 Fujitsu Ltd Preparation method of mis electric field effect semiconductor system

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