JPS5423479A - Manufacture for field effect transistor of insulation gate type - Google Patents
Manufacture for field effect transistor of insulation gate typeInfo
- Publication number
- JPS5423479A JPS5423479A JP8843777A JP8843777A JPS5423479A JP S5423479 A JPS5423479 A JP S5423479A JP 8843777 A JP8843777 A JP 8843777A JP 8843777 A JP8843777 A JP 8843777A JP S5423479 A JPS5423479 A JP S5423479A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- field effect
- effect transistor
- gate type
- insulation gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To simplify the manufacturing process, by finishing the process with three etching processes; oxide film etching to form gate oxide film, nitride film etching to form source and drain regions, and metal evaporation layer etching for electrode formation.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8843777A JPS5423479A (en) | 1977-07-25 | 1977-07-25 | Manufacture for field effect transistor of insulation gate type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8843777A JPS5423479A (en) | 1977-07-25 | 1977-07-25 | Manufacture for field effect transistor of insulation gate type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5423479A true JPS5423479A (en) | 1979-02-22 |
Family
ID=13942762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8843777A Pending JPS5423479A (en) | 1977-07-25 | 1977-07-25 | Manufacture for field effect transistor of insulation gate type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5423479A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0016968A1 (en) * | 1979-04-09 | 1980-10-15 | International Business Machines Corporation | Method for fabricating self-aligned high resolution non planar devices employing low resolution registration |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508483A (en) * | 1973-05-21 | 1975-01-28 |
-
1977
- 1977-07-25 JP JP8843777A patent/JPS5423479A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508483A (en) * | 1973-05-21 | 1975-01-28 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0016968A1 (en) * | 1979-04-09 | 1980-10-15 | International Business Machines Corporation | Method for fabricating self-aligned high resolution non planar devices employing low resolution registration |
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