JPS5436190A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5436190A
JPS5436190A JP10233777A JP10233777A JPS5436190A JP S5436190 A JPS5436190 A JP S5436190A JP 10233777 A JP10233777 A JP 10233777A JP 10233777 A JP10233777 A JP 10233777A JP S5436190 A JPS5436190 A JP S5436190A
Authority
JP
Japan
Prior art keywords
oxide film
manufacture
semiconductor device
substrate
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10233777A
Other languages
Japanese (ja)
Inventor
Koichiro Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10233777A priority Critical patent/JPS5436190A/en
Publication of JPS5436190A publication Critical patent/JPS5436190A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To enable to form MIS type element even to the substrate hardly easy for stable oxide film formation, by forming the source and the drain region on the semiconductor substrate, oxidizing those with plasma after coating the region between them with the V group metallic thin film, and by converting the substrate under this into the gate oxide film.
COPYRIGHT: (C)1979,JPO&Japio
JP10233777A 1977-08-26 1977-08-26 Manufacture for semiconductor device Pending JPS5436190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10233777A JPS5436190A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10233777A JPS5436190A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5436190A true JPS5436190A (en) 1979-03-16

Family

ID=14324687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10233777A Pending JPS5436190A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5436190A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1699085A2 (en) 2005-03-03 2006-09-06 Fujitsu Limited III-V nitride semiconductor device and production method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1699085A2 (en) 2005-03-03 2006-09-06 Fujitsu Limited III-V nitride semiconductor device and production method thereof

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