JPS52122481A - Mos type semiconductor device and its production - Google Patents

Mos type semiconductor device and its production

Info

Publication number
JPS52122481A
JPS52122481A JP3952976A JP3952976A JPS52122481A JP S52122481 A JPS52122481 A JP S52122481A JP 3952976 A JP3952976 A JP 3952976A JP 3952976 A JP3952976 A JP 3952976A JP S52122481 A JPS52122481 A JP S52122481A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
type semiconductor
mos type
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3952976A
Other languages
Japanese (ja)
Other versions
JPS6032989B2 (en
Inventor
Takeya Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3952976A priority Critical patent/JPS6032989B2/en
Publication of JPS52122481A publication Critical patent/JPS52122481A/en
Publication of JPS6032989B2 publication Critical patent/JPS6032989B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To match channel and gate electrode positions nearly perfectly by forming recesses in a substrate, then ion-implanting to their side faces thereby forming channels and controlling the implantation.
COPYRIGHT: (C)1977,JPO&Japio
JP3952976A 1976-04-07 1976-04-07 Manufacturing method of MOS type semiconductor device Expired JPS6032989B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3952976A JPS6032989B2 (en) 1976-04-07 1976-04-07 Manufacturing method of MOS type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3952976A JPS6032989B2 (en) 1976-04-07 1976-04-07 Manufacturing method of MOS type semiconductor device

Publications (2)

Publication Number Publication Date
JPS52122481A true JPS52122481A (en) 1977-10-14
JPS6032989B2 JPS6032989B2 (en) 1985-07-31

Family

ID=12555560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3952976A Expired JPS6032989B2 (en) 1976-04-07 1976-04-07 Manufacturing method of MOS type semiconductor device

Country Status (1)

Country Link
JP (1) JPS6032989B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491187A (en) * 1977-12-21 1979-07-19 Tektronix Inc Semiconductor and method of fabricating same
JPS55133574A (en) * 1979-04-05 1980-10-17 Nec Corp Insulated gate field effect transistor
JPS583287A (en) * 1981-06-30 1983-01-10 Fujitsu Ltd Vertical cylindrical mos field effect transistor
JPS5858771A (en) * 1981-09-14 1983-04-07 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Insulated gate field effect transistor and method of producing same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5491187A (en) * 1977-12-21 1979-07-19 Tektronix Inc Semiconductor and method of fabricating same
JPS6318346B2 (en) * 1977-12-21 1988-04-18 Tektronix Inc
JPS55133574A (en) * 1979-04-05 1980-10-17 Nec Corp Insulated gate field effect transistor
JPS583287A (en) * 1981-06-30 1983-01-10 Fujitsu Ltd Vertical cylindrical mos field effect transistor
JPS5858771A (en) * 1981-09-14 1983-04-07 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Insulated gate field effect transistor and method of producing same
JPH058586B2 (en) * 1981-09-14 1993-02-02 Fuiritsupusu Furuuiranpenfuaburiken Nv

Also Published As

Publication number Publication date
JPS6032989B2 (en) 1985-07-31

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