JPS5427382A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS5427382A JPS5427382A JP9285077A JP9285077A JPS5427382A JP S5427382 A JPS5427382 A JP S5427382A JP 9285077 A JP9285077 A JP 9285077A JP 9285077 A JP9285077 A JP 9285077A JP S5427382 A JPS5427382 A JP S5427382A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- circuit device
- poly
- areas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain a device of the low-resistance wiring structure by providing a silicide layer of Si and a metal resisting to a high temperature at the bottom part of the poly Si at the areas other than the gate electrode of the active element.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9285077A JPS5427382A (en) | 1977-08-01 | 1977-08-01 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9285077A JPS5427382A (en) | 1977-08-01 | 1977-08-01 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5427382A true JPS5427382A (en) | 1979-03-01 |
Family
ID=14065892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9285077A Pending JPS5427382A (en) | 1977-08-01 | 1977-08-01 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5427382A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57122540A (en) * | 1980-12-09 | 1982-07-30 | Fairchild Camera Instr Co | Multilayer metallic silicide mutual wire for integrated circuit |
JPH02146767A (en) * | 1989-07-19 | 1990-06-05 | Mitsubishi Electric Corp | Semiconductor memory device |
JPH04185683A (en) * | 1990-11-21 | 1992-07-02 | Sekisui Chem Co Ltd | Production of polyvinyl acetate adhesive |
-
1977
- 1977-08-01 JP JP9285077A patent/JPS5427382A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57122540A (en) * | 1980-12-09 | 1982-07-30 | Fairchild Camera Instr Co | Multilayer metallic silicide mutual wire for integrated circuit |
JPH0219974B2 (en) * | 1980-12-09 | 1990-05-07 | Fueachairudo Kamera Endo Insutsurumento Corp | |
JPH02146767A (en) * | 1989-07-19 | 1990-06-05 | Mitsubishi Electric Corp | Semiconductor memory device |
JPH04185683A (en) * | 1990-11-21 | 1992-07-02 | Sekisui Chem Co Ltd | Production of polyvinyl acetate adhesive |
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