JPS5427382A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS5427382A
JPS5427382A JP9285077A JP9285077A JPS5427382A JP S5427382 A JPS5427382 A JP S5427382A JP 9285077 A JP9285077 A JP 9285077A JP 9285077 A JP9285077 A JP 9285077A JP S5427382 A JPS5427382 A JP S5427382A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
poly
areas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9285077A
Other languages
Japanese (ja)
Inventor
Toshio Hara
Toru Tsujiide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9285077A priority Critical patent/JPS5427382A/en
Publication of JPS5427382A publication Critical patent/JPS5427382A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain a device of the low-resistance wiring structure by providing a silicide layer of Si and a metal resisting to a high temperature at the bottom part of the poly Si at the areas other than the gate electrode of the active element.
COPYRIGHT: (C)1979,JPO&Japio
JP9285077A 1977-08-01 1977-08-01 Semiconductor integrated circuit device Pending JPS5427382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9285077A JPS5427382A (en) 1977-08-01 1977-08-01 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9285077A JPS5427382A (en) 1977-08-01 1977-08-01 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5427382A true JPS5427382A (en) 1979-03-01

Family

ID=14065892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9285077A Pending JPS5427382A (en) 1977-08-01 1977-08-01 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5427382A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122540A (en) * 1980-12-09 1982-07-30 Fairchild Camera Instr Co Multilayer metallic silicide mutual wire for integrated circuit
JPH02146767A (en) * 1989-07-19 1990-06-05 Mitsubishi Electric Corp Semiconductor memory device
JPH04185683A (en) * 1990-11-21 1992-07-02 Sekisui Chem Co Ltd Production of polyvinyl acetate adhesive

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57122540A (en) * 1980-12-09 1982-07-30 Fairchild Camera Instr Co Multilayer metallic silicide mutual wire for integrated circuit
JPH0219974B2 (en) * 1980-12-09 1990-05-07 Fueachairudo Kamera Endo Insutsurumento Corp
JPH02146767A (en) * 1989-07-19 1990-06-05 Mitsubishi Electric Corp Semiconductor memory device
JPH04185683A (en) * 1990-11-21 1992-07-02 Sekisui Chem Co Ltd Production of polyvinyl acetate adhesive

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