JPS5398788A - Manufacture for semiconductor integrated circuit - Google Patents

Manufacture for semiconductor integrated circuit

Info

Publication number
JPS5398788A
JPS5398788A JP1249577A JP1249577A JPS5398788A JP S5398788 A JPS5398788 A JP S5398788A JP 1249577 A JP1249577 A JP 1249577A JP 1249577 A JP1249577 A JP 1249577A JP S5398788 A JPS5398788 A JP S5398788A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
semiconductor integrated
domain
contact hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1249577A
Other languages
Japanese (ja)
Inventor
Masayoshi Ino
Hiroshi Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1249577A priority Critical patent/JPS5398788A/en
Publication of JPS5398788A publication Critical patent/JPS5398788A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To increase the yield rate of high density MOS type IC memory, by making the thickness of the insulating film on the domain to be contact hole on the first layer polycrystal Si and on the domain to be the contact hole on the second layer polycrystal Si and diffusion.
COPYRIGHT: (C)1978,JPO&Japio
JP1249577A 1977-02-09 1977-02-09 Manufacture for semiconductor integrated circuit Pending JPS5398788A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1249577A JPS5398788A (en) 1977-02-09 1977-02-09 Manufacture for semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1249577A JPS5398788A (en) 1977-02-09 1977-02-09 Manufacture for semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS5398788A true JPS5398788A (en) 1978-08-29

Family

ID=11806949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1249577A Pending JPS5398788A (en) 1977-02-09 1977-02-09 Manufacture for semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5398788A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172350A (en) * 1985-01-28 1986-08-04 Matsushita Electric Ind Co Ltd Semiconductor device and manufacture thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515568A (en) * 1974-07-05 1976-01-17 Oki Electric Ind Co Ltd Tasohaisenkairono seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515568A (en) * 1974-07-05 1976-01-17 Oki Electric Ind Co Ltd Tasohaisenkairono seizohoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172350A (en) * 1985-01-28 1986-08-04 Matsushita Electric Ind Co Ltd Semiconductor device and manufacture thereof

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