JPS5398788A - Manufacture for semiconductor integrated circuit - Google Patents
Manufacture for semiconductor integrated circuitInfo
- Publication number
- JPS5398788A JPS5398788A JP1249577A JP1249577A JPS5398788A JP S5398788 A JPS5398788 A JP S5398788A JP 1249577 A JP1249577 A JP 1249577A JP 1249577 A JP1249577 A JP 1249577A JP S5398788 A JPS5398788 A JP S5398788A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- semiconductor integrated
- domain
- contact hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To increase the yield rate of high density MOS type IC memory, by making the thickness of the insulating film on the domain to be contact hole on the first layer polycrystal Si and on the domain to be the contact hole on the second layer polycrystal Si and diffusion.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1249577A JPS5398788A (en) | 1977-02-09 | 1977-02-09 | Manufacture for semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1249577A JPS5398788A (en) | 1977-02-09 | 1977-02-09 | Manufacture for semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5398788A true JPS5398788A (en) | 1978-08-29 |
Family
ID=11806949
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1249577A Pending JPS5398788A (en) | 1977-02-09 | 1977-02-09 | Manufacture for semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5398788A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61172350A (en) * | 1985-01-28 | 1986-08-04 | Matsushita Electric Ind Co Ltd | Semiconductor device and manufacture thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS515568A (en) * | 1974-07-05 | 1976-01-17 | Oki Electric Ind Co Ltd | Tasohaisenkairono seizohoho |
-
1977
- 1977-02-09 JP JP1249577A patent/JPS5398788A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS515568A (en) * | 1974-07-05 | 1976-01-17 | Oki Electric Ind Co Ltd | Tasohaisenkairono seizohoho |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61172350A (en) * | 1985-01-28 | 1986-08-04 | Matsushita Electric Ind Co Ltd | Semiconductor device and manufacture thereof |
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