JPS51145285A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS51145285A
JPS51145285A JP6980275A JP6980275A JPS51145285A JP S51145285 A JPS51145285 A JP S51145285A JP 6980275 A JP6980275 A JP 6980275A JP 6980275 A JP6980275 A JP 6980275A JP S51145285 A JPS51145285 A JP S51145285A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
wirings
integrated circuit
manufacture method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6980275A
Other languages
Japanese (ja)
Other versions
JPS5746656B2 (en
Inventor
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6980275A priority Critical patent/JPS51145285A/en
Publication of JPS51145285A publication Critical patent/JPS51145285A/en
Publication of JPS5746656B2 publication Critical patent/JPS5746656B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: Manufacture method of semiconductor integrated circuit, whose face is few step difference, and capable of high density owing to easy forming of contact parts between wirings and minimal dimension required.
COPYRIGHT: (C)1976,JPO&Japio
JP6980275A 1975-06-09 1975-06-09 Manufacture of semiconductor device Granted JPS51145285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6980275A JPS51145285A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6980275A JPS51145285A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51145285A true JPS51145285A (en) 1976-12-14
JPS5746656B2 JPS5746656B2 (en) 1982-10-05

Family

ID=13413228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6980275A Granted JPS51145285A (en) 1975-06-09 1975-06-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51145285A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139389A (en) * 1976-05-14 1977-11-21 Ibm Selffmatching fet transistor and method of producing same
JPS5451785A (en) * 1977-10-03 1979-04-23 Oki Electric Ind Co Ltd Manufacture of mos-type semiconductor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139389A (en) * 1976-05-14 1977-11-21 Ibm Selffmatching fet transistor and method of producing same
JPS571145B2 (en) * 1976-05-14 1982-01-09
JPS5451785A (en) * 1977-10-03 1979-04-23 Oki Electric Ind Co Ltd Manufacture of mos-type semiconductor
JPS5927098B2 (en) * 1977-10-03 1984-07-03 沖電気工業株式会社 Method for manufacturing MOS type semiconductor integrated circuit

Also Published As

Publication number Publication date
JPS5746656B2 (en) 1982-10-05

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