JPS52106675A - Manufacturing method of semiconductor device - Google Patents
Manufacturing method of semiconductor deviceInfo
- Publication number
- JPS52106675A JPS52106675A JP2313276A JP2313276A JPS52106675A JP S52106675 A JPS52106675 A JP S52106675A JP 2313276 A JP2313276 A JP 2313276A JP 2313276 A JP2313276 A JP 2313276A JP S52106675 A JPS52106675 A JP S52106675A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing
- checking
- prevented
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide manufacturing method of semiconductor device on which cut out of metal wiring layer is prevented without checking and increasing additional photograph etching process.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2313276A JPS52106675A (en) | 1976-03-05 | 1976-03-05 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2313276A JPS52106675A (en) | 1976-03-05 | 1976-03-05 | Manufacturing method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52106675A true JPS52106675A (en) | 1977-09-07 |
Family
ID=12101992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2313276A Pending JPS52106675A (en) | 1976-03-05 | 1976-03-05 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52106675A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52142488A (en) * | 1976-05-21 | 1977-11-28 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS5635435A (en) * | 1979-08-31 | 1981-04-08 | Fujitsu Ltd | Manufacturing of semiconductor device |
JPS57169261A (en) * | 1981-04-10 | 1982-10-18 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5815250A (en) * | 1981-07-21 | 1983-01-28 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1976
- 1976-03-05 JP JP2313276A patent/JPS52106675A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52142488A (en) * | 1976-05-21 | 1977-11-28 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS5635435A (en) * | 1979-08-31 | 1981-04-08 | Fujitsu Ltd | Manufacturing of semiconductor device |
JPS57169261A (en) * | 1981-04-10 | 1982-10-18 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6362103B2 (en) * | 1981-04-10 | 1988-12-01 | ||
JPS5815250A (en) * | 1981-07-21 | 1983-01-28 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS637464B2 (en) * | 1981-07-21 | 1988-02-17 | Fujitsu Ltd |
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