JPS52106675A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS52106675A
JPS52106675A JP2313276A JP2313276A JPS52106675A JP S52106675 A JPS52106675 A JP S52106675A JP 2313276 A JP2313276 A JP 2313276A JP 2313276 A JP2313276 A JP 2313276A JP S52106675 A JPS52106675 A JP S52106675A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing method
japio
jpo
copyright
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2313276A
Inventor
Shigeharu Horiuchi
Makoto Nakase
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2313276A priority Critical patent/JPS52106675A/en
Publication of JPS52106675A publication Critical patent/JPS52106675A/en
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To provide manufacturing method of semiconductor device on which cut out of metal wiring layer is prevented without checking and increasing additional photograph etching process.
COPYRIGHT: (C)1977,JPO&Japio
JP2313276A 1976-03-05 1976-03-05 Manufacturing method of semiconductor device Granted JPS52106675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2313276A JPS52106675A (en) 1976-03-05 1976-03-05 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2313276A JPS52106675A (en) 1976-03-05 1976-03-05 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52106675A true JPS52106675A (en) 1977-09-07

Family

ID=12101992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2313276A Granted JPS52106675A (en) 1976-03-05 1976-03-05 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52106675A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52142488A (en) * 1976-05-21 1977-11-28 Mitsubishi Electric Corp Production of semiconductor device
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device
JPS57169261A (en) * 1981-04-10 1982-10-18 Fujitsu Ltd Manufacture of semiconductor device
JPS5815250A (en) * 1981-07-21 1983-01-28 Fujitsu Ltd Manufacture of semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52142488A (en) * 1976-05-21 1977-11-28 Mitsubishi Electric Corp Production of semiconductor device
JPS5635435A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Manufacturing of semiconductor device
JPS57169261A (en) * 1981-04-10 1982-10-18 Fujitsu Ltd Manufacture of semiconductor device
JPS6362103B2 (en) * 1981-04-10 1988-12-01
JPS5815250A (en) * 1981-07-21 1983-01-28 Fujitsu Ltd Manufacture of semiconductor device
JPS637464B2 (en) * 1981-07-21 1988-02-17 Fujitsu Ltd

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