JPS53117985A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS53117985A
JPS53117985A JP3212777A JP3212777A JPS53117985A JP S53117985 A JPS53117985 A JP S53117985A JP 3212777 A JP3212777 A JP 3212777A JP 3212777 A JP3212777 A JP 3212777A JP S53117985 A JPS53117985 A JP S53117985A
Authority
JP
Japan
Prior art keywords
semiconductor device
oxidizing
forming
connection hole
reduce parasitic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3212777A
Other languages
Japanese (ja)
Inventor
Toshio Yoshii
Yukio Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3212777A priority Critical patent/JPS53117985A/en
Publication of JPS53117985A publication Critical patent/JPS53117985A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To reduce parasitic capacity by oxidizing the wiring metal having been deposited leaving connection hole parts and forming second wiring layer.
COPYRIGHT: (C)1978,JPO&Japio
JP3212777A 1977-03-25 1977-03-25 Semiconductor device Pending JPS53117985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3212777A JPS53117985A (en) 1977-03-25 1977-03-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3212777A JPS53117985A (en) 1977-03-25 1977-03-25 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS53117985A true JPS53117985A (en) 1978-10-14

Family

ID=12350211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3212777A Pending JPS53117985A (en) 1977-03-25 1977-03-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS53117985A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100301480A1 (en) * 2009-05-27 2010-12-02 Suk-Hun Choi Semiconductor device having a conductive structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100301480A1 (en) * 2009-05-27 2010-12-02 Suk-Hun Choi Semiconductor device having a conductive structure
US8575753B2 (en) * 2009-05-27 2013-11-05 Samsung Electronics Co., Ltd. Semiconductor device having a conductive structure including oxide and non oxide portions

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