JPS533085A - Production of semiconductor integrated circuit - Google Patents
Production of semiconductor integrated circuitInfo
- Publication number
- JPS533085A JPS533085A JP7720976A JP7720976A JPS533085A JP S533085 A JPS533085 A JP S533085A JP 7720976 A JP7720976 A JP 7720976A JP 7720976 A JP7720976 A JP 7720976A JP S533085 A JPS533085 A JP S533085A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- wiring layers
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To narrow the spacing between connection parts without causing shorting between adjoining wiring layers by beforehand depositing a dissimilar metal in the wiring-towiring spaces and allowing the deposited metal to form wiring layers to cause self-alignment effect.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7720976A JPS533085A (en) | 1976-06-29 | 1976-06-29 | Production of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7720976A JPS533085A (en) | 1976-06-29 | 1976-06-29 | Production of semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS533085A true JPS533085A (en) | 1978-01-12 |
Family
ID=13627425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7720976A Pending JPS533085A (en) | 1976-06-29 | 1976-06-29 | Production of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS533085A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5555027U (en) * | 1978-10-12 | 1980-04-14 | ||
CN1300625C (en) * | 2003-03-11 | 2007-02-14 | 精工爱普生株式会社 | Projector |
-
1976
- 1976-06-29 JP JP7720976A patent/JPS533085A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5555027U (en) * | 1978-10-12 | 1980-04-14 | ||
JPS5733691Y2 (en) * | 1978-10-12 | 1982-07-26 | ||
CN1300625C (en) * | 2003-03-11 | 2007-02-14 | 精工爱普生株式会社 | Projector |
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