JPS53105389A - Manufacture for insulating gate type semiconductor integrated circuit - Google Patents

Manufacture for insulating gate type semiconductor integrated circuit

Info

Publication number
JPS53105389A
JPS53105389A JP1933277A JP1933277A JPS53105389A JP S53105389 A JPS53105389 A JP S53105389A JP 1933277 A JP1933277 A JP 1933277A JP 1933277 A JP1933277 A JP 1933277A JP S53105389 A JPS53105389 A JP S53105389A
Authority
JP
Japan
Prior art keywords
manufacture
integrated circuit
type semiconductor
semiconductor integrated
gate type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1933277A
Other languages
Japanese (ja)
Other versions
JPS5951146B2 (en
Inventor
Hiroyuki Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP52019332A priority Critical patent/JPS5951146B2/en
Publication of JPS53105389A publication Critical patent/JPS53105389A/en
Publication of JPS5951146B2 publication Critical patent/JPS5951146B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the two dimentional occupied area by growing the gate insulating film for load transistor and the polisilicon substratte on the gate electrode of the driving transistor in RAM element and by commonly using the gate electrode.
COPYRIGHT: (C)1978,JPO&Japio
JP52019332A 1977-02-25 1977-02-25 Method for manufacturing insulated gate semiconductor integrated circuit Expired JPS5951146B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52019332A JPS5951146B2 (en) 1977-02-25 1977-02-25 Method for manufacturing insulated gate semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52019332A JPS5951146B2 (en) 1977-02-25 1977-02-25 Method for manufacturing insulated gate semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS53105389A true JPS53105389A (en) 1978-09-13
JPS5951146B2 JPS5951146B2 (en) 1984-12-12

Family

ID=11996443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52019332A Expired JPS5951146B2 (en) 1977-02-25 1977-02-25 Method for manufacturing insulated gate semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5951146B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598852A (en) * 1979-01-23 1980-07-28 Nec Corp Memory device
JPS5691470A (en) * 1979-12-25 1981-07-24 Toshiba Corp Semiconductor
JPS57192081A (en) * 1981-05-19 1982-11-26 Ibm Field effect transistor unit
JPS5892253A (en) * 1981-11-28 1983-06-01 Mitsubishi Electric Corp Semiconductor memory device
JPS61121467A (en) * 1984-11-19 1986-06-09 Seiko Epson Corp Semiconductor memory

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5598852A (en) * 1979-01-23 1980-07-28 Nec Corp Memory device
JPS5691470A (en) * 1979-12-25 1981-07-24 Toshiba Corp Semiconductor
JPS57192081A (en) * 1981-05-19 1982-11-26 Ibm Field effect transistor unit
JPH0325949B2 (en) * 1981-05-19 1991-04-09 Intaanashonaru Bijinesu Mashiinzu Corp
JPS5892253A (en) * 1981-11-28 1983-06-01 Mitsubishi Electric Corp Semiconductor memory device
JPS61121467A (en) * 1984-11-19 1986-06-09 Seiko Epson Corp Semiconductor memory
JPH0691222B2 (en) * 1984-11-19 1994-11-14 セイコーエプソン株式会社 Semiconductor memory device

Also Published As

Publication number Publication date
JPS5951146B2 (en) 1984-12-12

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