JPS5233490A - Manufacturing process of semiconductor device - Google Patents
Manufacturing process of semiconductor deviceInfo
- Publication number
- JPS5233490A JPS5233490A JP10933975A JP10933975A JPS5233490A JP S5233490 A JPS5233490 A JP S5233490A JP 10933975 A JP10933975 A JP 10933975A JP 10933975 A JP10933975 A JP 10933975A JP S5233490 A JPS5233490 A JP S5233490A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing process
- wiring
- electrode
- apertur
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve the reliability of the semiconductor device which is having thin electrode-wiring coated film, by coating the surface with silicon nitride film so that the apertur can be made without etching the electrode wiring.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10933975A JPS5233490A (en) | 1975-09-09 | 1975-09-09 | Manufacturing process of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10933975A JPS5233490A (en) | 1975-09-09 | 1975-09-09 | Manufacturing process of semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10068783A Division JPS5963745A (en) | 1983-06-06 | 1983-06-06 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5233490A true JPS5233490A (en) | 1977-03-14 |
Family
ID=14507711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10933975A Pending JPS5233490A (en) | 1975-09-09 | 1975-09-09 | Manufacturing process of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5233490A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53115173A (en) * | 1977-03-18 | 1978-10-07 | Hitachi Ltd | Production of semiconductor device |
JPS56111232A (en) * | 1980-02-07 | 1981-09-02 | Fujitsu Ltd | Preparation of semiconductor device |
JPS56111251A (en) * | 1980-02-07 | 1981-09-02 | Fujitsu Ltd | Preparation of semiconductor device |
JPS584949A (en) * | 1981-06-30 | 1983-01-12 | Fujitsu Ltd | Semiconductor device |
JPS5893260A (en) * | 1981-11-30 | 1983-06-02 | Toshiba Corp | Manufacture of semiconductor device |
JPS58188141A (en) * | 1982-04-27 | 1983-11-02 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
JPS60167447A (en) * | 1984-02-10 | 1985-08-30 | Matsushita Electronics Corp | Manufacture of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5021677A (en) * | 1973-06-26 | 1975-03-07 |
-
1975
- 1975-09-09 JP JP10933975A patent/JPS5233490A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5021677A (en) * | 1973-06-26 | 1975-03-07 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53115173A (en) * | 1977-03-18 | 1978-10-07 | Hitachi Ltd | Production of semiconductor device |
JPH0415619B2 (en) * | 1977-03-18 | 1992-03-18 | Hitachi Ltd | |
JPS56111232A (en) * | 1980-02-07 | 1981-09-02 | Fujitsu Ltd | Preparation of semiconductor device |
JPS56111251A (en) * | 1980-02-07 | 1981-09-02 | Fujitsu Ltd | Preparation of semiconductor device |
JPS584949A (en) * | 1981-06-30 | 1983-01-12 | Fujitsu Ltd | Semiconductor device |
JPS5893260A (en) * | 1981-11-30 | 1983-06-02 | Toshiba Corp | Manufacture of semiconductor device |
JPS58188141A (en) * | 1982-04-27 | 1983-11-02 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
JPS60167447A (en) * | 1984-02-10 | 1985-08-30 | Matsushita Electronics Corp | Manufacture of semiconductor device |
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