JPS5233490A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS5233490A
JPS5233490A JP10933975A JP10933975A JPS5233490A JP S5233490 A JPS5233490 A JP S5233490A JP 10933975 A JP10933975 A JP 10933975A JP 10933975 A JP10933975 A JP 10933975A JP S5233490 A JPS5233490 A JP S5233490A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
wiring
electrode
apertur
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10933975A
Other languages
Japanese (ja)
Inventor
Koichi Higuchi
Takehiko Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10933975A priority Critical patent/JPS5233490A/en
Publication of JPS5233490A publication Critical patent/JPS5233490A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve the reliability of the semiconductor device which is having thin electrode-wiring coated film, by coating the surface with silicon nitride film so that the apertur can be made without etching the electrode wiring.
COPYRIGHT: (C)1977,JPO&Japio
JP10933975A 1975-09-09 1975-09-09 Manufacturing process of semiconductor device Pending JPS5233490A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10933975A JPS5233490A (en) 1975-09-09 1975-09-09 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10933975A JPS5233490A (en) 1975-09-09 1975-09-09 Manufacturing process of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP10068783A Division JPS5963745A (en) 1983-06-06 1983-06-06 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5233490A true JPS5233490A (en) 1977-03-14

Family

ID=14507711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10933975A Pending JPS5233490A (en) 1975-09-09 1975-09-09 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5233490A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53115173A (en) * 1977-03-18 1978-10-07 Hitachi Ltd Production of semiconductor device
JPS56111232A (en) * 1980-02-07 1981-09-02 Fujitsu Ltd Preparation of semiconductor device
JPS56111251A (en) * 1980-02-07 1981-09-02 Fujitsu Ltd Preparation of semiconductor device
JPS584949A (en) * 1981-06-30 1983-01-12 Fujitsu Ltd Semiconductor device
JPS5893260A (en) * 1981-11-30 1983-06-02 Toshiba Corp Manufacture of semiconductor device
JPS58188141A (en) * 1982-04-27 1983-11-02 Mitsubishi Electric Corp Semiconductor device and manufacture thereof
JPS60167447A (en) * 1984-02-10 1985-08-30 Matsushita Electronics Corp Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021677A (en) * 1973-06-26 1975-03-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5021677A (en) * 1973-06-26 1975-03-07

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53115173A (en) * 1977-03-18 1978-10-07 Hitachi Ltd Production of semiconductor device
JPH0415619B2 (en) * 1977-03-18 1992-03-18 Hitachi Ltd
JPS56111232A (en) * 1980-02-07 1981-09-02 Fujitsu Ltd Preparation of semiconductor device
JPS56111251A (en) * 1980-02-07 1981-09-02 Fujitsu Ltd Preparation of semiconductor device
JPS584949A (en) * 1981-06-30 1983-01-12 Fujitsu Ltd Semiconductor device
JPS5893260A (en) * 1981-11-30 1983-06-02 Toshiba Corp Manufacture of semiconductor device
JPS58188141A (en) * 1982-04-27 1983-11-02 Mitsubishi Electric Corp Semiconductor device and manufacture thereof
JPS60167447A (en) * 1984-02-10 1985-08-30 Matsushita Electronics Corp Manufacture of semiconductor device

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