JPS5236983A - Mos type semiconductor integrated circuit device and process for produ ction of same - Google Patents
Mos type semiconductor integrated circuit device and process for produ ction of sameInfo
- Publication number
- JPS5236983A JPS5236983A JP50113343A JP11334375A JPS5236983A JP S5236983 A JPS5236983 A JP S5236983A JP 50113343 A JP50113343 A JP 50113343A JP 11334375 A JP11334375 A JP 11334375A JP S5236983 A JPS5236983 A JP S5236983A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- same
- type semiconductor
- semiconductor integrated
- circuit device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Si substrate is used to make a silicon on insulator construction, whereby MOSFET featuring higher speed and higher degree of integration by having the advantages of both conventional MOSFET and SMOS-MOSFET is composed.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50113343A JPS5236983A (en) | 1975-09-18 | 1975-09-18 | Mos type semiconductor integrated circuit device and process for produ ction of same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50113343A JPS5236983A (en) | 1975-09-18 | 1975-09-18 | Mos type semiconductor integrated circuit device and process for produ ction of same |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5236983A true JPS5236983A (en) | 1977-03-22 |
Family
ID=14609828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50113343A Pending JPS5236983A (en) | 1975-09-18 | 1975-09-18 | Mos type semiconductor integrated circuit device and process for produ ction of same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5236983A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5662369A (en) * | 1979-10-26 | 1981-05-28 | Toshiba Corp | Mos semiconductor device |
JPS577161A (en) * | 1980-06-16 | 1982-01-14 | Toshiba Corp | Mos semiconductor device |
JPS5739579A (en) * | 1980-08-20 | 1982-03-04 | Toshiba Corp | Mos semiconductor device and manufacture thereof |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4830882A (en) * | 1971-08-23 | 1973-04-23 |
-
1975
- 1975-09-18 JP JP50113343A patent/JPS5236983A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4830882A (en) * | 1971-08-23 | 1973-04-23 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5662369A (en) * | 1979-10-26 | 1981-05-28 | Toshiba Corp | Mos semiconductor device |
JPS577161A (en) * | 1980-06-16 | 1982-01-14 | Toshiba Corp | Mos semiconductor device |
JPS5739579A (en) * | 1980-08-20 | 1982-03-04 | Toshiba Corp | Mos semiconductor device and manufacture thereof |
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