JPS5385166A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5385166A
JPS5385166A JP3277A JP3277A JPS5385166A JP S5385166 A JPS5385166 A JP S5385166A JP 3277 A JP3277 A JP 3277A JP 3277 A JP3277 A JP 3277A JP S5385166 A JPS5385166 A JP S5385166A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
oxidetion
polysi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3277A
Other languages
Japanese (ja)
Inventor
Yuji Tanida
Hideo Sunami
Yasuo Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3277A priority Critical patent/JPS5385166A/en
Publication of JPS5385166A publication Critical patent/JPS5385166A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To increase the ratio of oxide film thicknesses of a Si substrate and PolySi pattern parts and obtain stable oxide films by selectively implanting nitrogen ions on the Si substrate surface and making use of the mask effect for the oxidetion of nitride.
COPYRIGHT: (C)1978,JPO&Japio
JP3277A 1977-01-05 1977-01-05 Production of semiconductor device Pending JPS5385166A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3277A JPS5385166A (en) 1977-01-05 1977-01-05 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3277A JPS5385166A (en) 1977-01-05 1977-01-05 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5385166A true JPS5385166A (en) 1978-07-27

Family

ID=11462999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3277A Pending JPS5385166A (en) 1977-01-05 1977-01-05 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5385166A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157266A (en) * 1979-05-25 1980-12-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157266A (en) * 1979-05-25 1980-12-06 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor device

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