JPS5397791A - Production of semiconductor integrated circuit device - Google Patents
Production of semiconductor integrated circuit deviceInfo
- Publication number
- JPS5397791A JPS5397791A JP1276277A JP1276277A JPS5397791A JP S5397791 A JPS5397791 A JP S5397791A JP 1276277 A JP1276277 A JP 1276277A JP 1276277 A JP1276277 A JP 1276277A JP S5397791 A JPS5397791 A JP S5397791A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To utilize remaining regions for resistor elements or wirings by selectively implanting O2 ions to the poly-Si thin film on substrate surface and converting said film to SiO2.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1276277A JPS5397791A (en) | 1977-02-07 | 1977-02-07 | Production of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1276277A JPS5397791A (en) | 1977-02-07 | 1977-02-07 | Production of semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5397791A true JPS5397791A (en) | 1978-08-26 |
Family
ID=11814401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1276277A Pending JPS5397791A (en) | 1977-02-07 | 1977-02-07 | Production of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5397791A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55117264A (en) * | 1979-03-01 | 1980-09-09 | Nec Corp | Semiconductor device |
US4965214A (en) * | 1987-07-31 | 1990-10-23 | Samsung Electronics Co., Ltd. | Method for manufacturing poly-crystal sillicon having high resistance |
-
1977
- 1977-02-07 JP JP1276277A patent/JPS5397791A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55117264A (en) * | 1979-03-01 | 1980-09-09 | Nec Corp | Semiconductor device |
US4965214A (en) * | 1987-07-31 | 1990-10-23 | Samsung Electronics Co., Ltd. | Method for manufacturing poly-crystal sillicon having high resistance |
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