JPS5413781A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS5413781A
JPS5413781A JP7931577A JP7931577A JPS5413781A JP S5413781 A JPS5413781 A JP S5413781A JP 7931577 A JP7931577 A JP 7931577A JP 7931577 A JP7931577 A JP 7931577A JP S5413781 A JPS5413781 A JP S5413781A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
oxide film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7931577A
Other languages
Japanese (ja)
Other versions
JPS5653218B2 (en
Inventor
Shigeru Nakashima
Manabu Henmi
Yutaka Yoriume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7931577A priority Critical patent/JPS5413781A/en
Publication of JPS5413781A publication Critical patent/JPS5413781A/en
Publication of JPS5653218B2 publication Critical patent/JPS5653218B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To provide extremely fine open windows in substrate oxide film by laminating Si3N4, poly-Si on the oxide film of a Si substrate and selectively oxidizing these through a Si3N4 mask.
COPYRIGHT: (C)1979,JPO&Japio
JP7931577A 1977-07-01 1977-07-01 Production of semiconductor integrated circuit Granted JPS5413781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7931577A JPS5413781A (en) 1977-07-01 1977-07-01 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7931577A JPS5413781A (en) 1977-07-01 1977-07-01 Production of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS5413781A true JPS5413781A (en) 1979-02-01
JPS5653218B2 JPS5653218B2 (en) 1981-12-17

Family

ID=13686422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7931577A Granted JPS5413781A (en) 1977-07-01 1977-07-01 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS5413781A (en)

Also Published As

Publication number Publication date
JPS5653218B2 (en) 1981-12-17

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