JPS5413781A - Production of semiconductor integrated circuit - Google Patents
Production of semiconductor integrated circuitInfo
- Publication number
- JPS5413781A JPS5413781A JP7931577A JP7931577A JPS5413781A JP S5413781 A JPS5413781 A JP S5413781A JP 7931577 A JP7931577 A JP 7931577A JP 7931577 A JP7931577 A JP 7931577A JP S5413781 A JPS5413781 A JP S5413781A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- oxide film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Abstract
PURPOSE: To provide extremely fine open windows in substrate oxide film by laminating Si3N4, poly-Si on the oxide film of a Si substrate and selectively oxidizing these through a Si3N4 mask.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7931577A JPS5413781A (en) | 1977-07-01 | 1977-07-01 | Production of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7931577A JPS5413781A (en) | 1977-07-01 | 1977-07-01 | Production of semiconductor integrated circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5413781A true JPS5413781A (en) | 1979-02-01 |
JPS5653218B2 JPS5653218B2 (en) | 1981-12-17 |
Family
ID=13686422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7931577A Granted JPS5413781A (en) | 1977-07-01 | 1977-07-01 | Production of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5413781A (en) |
-
1977
- 1977-07-01 JP JP7931577A patent/JPS5413781A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5653218B2 (en) | 1981-12-17 |
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