JPS5252364A - Production of insb film - Google Patents
Production of insb filmInfo
- Publication number
- JPS5252364A JPS5252364A JP50127404A JP12740475A JPS5252364A JP S5252364 A JPS5252364 A JP S5252364A JP 50127404 A JP50127404 A JP 50127404A JP 12740475 A JP12740475 A JP 12740475A JP S5252364 A JPS5252364 A JP S5252364A
- Authority
- JP
- Japan
- Prior art keywords
- film
- production
- insb film
- insb
- specified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To suppress occurrelnce of undulation by piling on a substrate successively the specified glass film, InSb film, oxide film containing In2O3, and the specified film followed by melting and recrystallizing the InSb film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50127404A JPS5816330B2 (en) | 1975-10-24 | 1975-10-24 | INSB Makunoseizouhouhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50127404A JPS5816330B2 (en) | 1975-10-24 | 1975-10-24 | INSB Makunoseizouhouhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5252364A true JPS5252364A (en) | 1977-04-27 |
JPS5816330B2 JPS5816330B2 (en) | 1983-03-30 |
Family
ID=14959140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50127404A Expired JPS5816330B2 (en) | 1975-10-24 | 1975-10-24 | INSB Makunoseizouhouhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5816330B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61131524A (en) * | 1984-11-30 | 1986-06-19 | Yokogawa Electric Corp | Semiconductor substrate |
-
1975
- 1975-10-24 JP JP50127404A patent/JPS5816330B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61131524A (en) * | 1984-11-30 | 1986-06-19 | Yokogawa Electric Corp | Semiconductor substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS5816330B2 (en) | 1983-03-30 |
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