JPS5252364A - Production of insb film - Google Patents

Production of insb film

Info

Publication number
JPS5252364A
JPS5252364A JP50127404A JP12740475A JPS5252364A JP S5252364 A JPS5252364 A JP S5252364A JP 50127404 A JP50127404 A JP 50127404A JP 12740475 A JP12740475 A JP 12740475A JP S5252364 A JPS5252364 A JP S5252364A
Authority
JP
Japan
Prior art keywords
film
production
insb film
insb
specified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50127404A
Other languages
Japanese (ja)
Other versions
JPS5816330B2 (en
Inventor
Nobuo Kodera
Tetsu Ooi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50127404A priority Critical patent/JPS5816330B2/en
Publication of JPS5252364A publication Critical patent/JPS5252364A/en
Publication of JPS5816330B2 publication Critical patent/JPS5816330B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To suppress occurrelnce of undulation by piling on a substrate successively the specified glass film, InSb film, oxide film containing In2O3, and the specified film followed by melting and recrystallizing the InSb film.
COPYRIGHT: (C)1977,JPO&Japio
JP50127404A 1975-10-24 1975-10-24 INSB Makunoseizouhouhou Expired JPS5816330B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50127404A JPS5816330B2 (en) 1975-10-24 1975-10-24 INSB Makunoseizouhouhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50127404A JPS5816330B2 (en) 1975-10-24 1975-10-24 INSB Makunoseizouhouhou

Publications (2)

Publication Number Publication Date
JPS5252364A true JPS5252364A (en) 1977-04-27
JPS5816330B2 JPS5816330B2 (en) 1983-03-30

Family

ID=14959140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50127404A Expired JPS5816330B2 (en) 1975-10-24 1975-10-24 INSB Makunoseizouhouhou

Country Status (1)

Country Link
JP (1) JPS5816330B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131524A (en) * 1984-11-30 1986-06-19 Yokogawa Electric Corp Semiconductor substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131524A (en) * 1984-11-30 1986-06-19 Yokogawa Electric Corp Semiconductor substrate

Also Published As

Publication number Publication date
JPS5816330B2 (en) 1983-03-30

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