JPS5249776A - Mos type semiconductor device - Google Patents
Mos type semiconductor deviceInfo
- Publication number
- JPS5249776A JPS5249776A JP12571375A JP12571375A JPS5249776A JP S5249776 A JPS5249776 A JP S5249776A JP 12571375 A JP12571375 A JP 12571375A JP 12571375 A JP12571375 A JP 12571375A JP S5249776 A JPS5249776 A JP S5249776A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- type semiconductor
- mos type
- serration
- flattened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To make a MOS type semiconductor device whose element surface is flattened to minimize serration, by selectively oxidizing the poly Si layer formed on an oxide film, using a nitride film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12571375A JPS5249776A (en) | 1975-10-17 | 1975-10-17 | Mos type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12571375A JPS5249776A (en) | 1975-10-17 | 1975-10-17 | Mos type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5249776A true JPS5249776A (en) | 1977-04-21 |
Family
ID=14916892
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12571375A Pending JPS5249776A (en) | 1975-10-17 | 1975-10-17 | Mos type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5249776A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60146944U (en) * | 1984-03-07 | 1985-09-30 | 日本ビクター株式会社 | rotating drum device |
-
1975
- 1975-10-17 JP JP12571375A patent/JPS5249776A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60146944U (en) * | 1984-03-07 | 1985-09-30 | 日本ビクター株式会社 | rotating drum device |
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