JPS5249776A - Mos type semiconductor device - Google Patents

Mos type semiconductor device

Info

Publication number
JPS5249776A
JPS5249776A JP12571375A JP12571375A JPS5249776A JP S5249776 A JPS5249776 A JP S5249776A JP 12571375 A JP12571375 A JP 12571375A JP 12571375 A JP12571375 A JP 12571375A JP S5249776 A JPS5249776 A JP S5249776A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
mos type
serration
flattened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12571375A
Other languages
Japanese (ja)
Inventor
Shigero Kuninobu
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12571375A priority Critical patent/JPS5249776A/en
Publication of JPS5249776A publication Critical patent/JPS5249776A/en
Pending legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To make a MOS type semiconductor device whose element surface is flattened to minimize serration, by selectively oxidizing the poly Si layer formed on an oxide film, using a nitride film.
COPYRIGHT: (C)1977,JPO&Japio
JP12571375A 1975-10-17 1975-10-17 Mos type semiconductor device Pending JPS5249776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12571375A JPS5249776A (en) 1975-10-17 1975-10-17 Mos type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12571375A JPS5249776A (en) 1975-10-17 1975-10-17 Mos type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5249776A true JPS5249776A (en) 1977-04-21

Family

ID=14916892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12571375A Pending JPS5249776A (en) 1975-10-17 1975-10-17 Mos type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5249776A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60146944U (en) * 1984-03-07 1985-09-30 日本ビクター株式会社 rotating drum device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60146944U (en) * 1984-03-07 1985-09-30 日本ビクター株式会社 rotating drum device

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