JPS52147969A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52147969A
JPS52147969A JP6502976A JP6502976A JPS52147969A JP S52147969 A JPS52147969 A JP S52147969A JP 6502976 A JP6502976 A JP 6502976A JP 6502976 A JP6502976 A JP 6502976A JP S52147969 A JPS52147969 A JP S52147969A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
layer
oxidizing
covering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6502976A
Other languages
Japanese (ja)
Inventor
Shigeru Kitabi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6502976A priority Critical patent/JPS52147969A/en
Publication of JPS52147969A publication Critical patent/JPS52147969A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To realize formation of a diffusion layer of a comparatively large diffusion depth in a short time by oxidizing Al or Ga layer on N-type Si substrate by covering it with Si3N4 film.
COPYRIGHT: (C)1977,JPO&Japio
JP6502976A 1976-06-02 1976-06-02 Manufacture of semiconductor device Pending JPS52147969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6502976A JPS52147969A (en) 1976-06-02 1976-06-02 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6502976A JPS52147969A (en) 1976-06-02 1976-06-02 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52147969A true JPS52147969A (en) 1977-12-08

Family

ID=13275131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6502976A Pending JPS52147969A (en) 1976-06-02 1976-06-02 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52147969A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792640U (en) * 1980-11-28 1982-06-07

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5030423A (en) * 1973-07-17 1975-03-26
JPS5127773A (en) * 1974-09-02 1976-03-08 Nippon Electric Co Kakusanso no keiseiho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5030423A (en) * 1973-07-17 1975-03-26
JPS5127773A (en) * 1974-09-02 1976-03-08 Nippon Electric Co Kakusanso no keiseiho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792640U (en) * 1980-11-28 1982-06-07
JPS5931556Y2 (en) * 1980-11-28 1984-09-06 功 田中 Net bag for storing agricultural products

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