JPS52147969A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS52147969A JPS52147969A JP6502976A JP6502976A JPS52147969A JP S52147969 A JPS52147969 A JP S52147969A JP 6502976 A JP6502976 A JP 6502976A JP 6502976 A JP6502976 A JP 6502976A JP S52147969 A JPS52147969 A JP S52147969A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- layer
- oxidizing
- covering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To realize formation of a diffusion layer of a comparatively large diffusion depth in a short time by oxidizing Al or Ga layer on N-type Si substrate by covering it with Si3N4 film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6502976A JPS52147969A (en) | 1976-06-02 | 1976-06-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6502976A JPS52147969A (en) | 1976-06-02 | 1976-06-02 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52147969A true JPS52147969A (en) | 1977-12-08 |
Family
ID=13275131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6502976A Pending JPS52147969A (en) | 1976-06-02 | 1976-06-02 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52147969A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5792640U (en) * | 1980-11-28 | 1982-06-07 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5030423A (en) * | 1973-07-17 | 1975-03-26 | ||
JPS5127773A (en) * | 1974-09-02 | 1976-03-08 | Nippon Electric Co | Kakusanso no keiseiho |
-
1976
- 1976-06-02 JP JP6502976A patent/JPS52147969A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5030423A (en) * | 1973-07-17 | 1975-03-26 | ||
JPS5127773A (en) * | 1974-09-02 | 1976-03-08 | Nippon Electric Co | Kakusanso no keiseiho |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5792640U (en) * | 1980-11-28 | 1982-06-07 | ||
JPS5931556Y2 (en) * | 1980-11-28 | 1984-09-06 | 功 田中 | Net bag for storing agricultural products |
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