JPS53148392A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53148392A JPS53148392A JP6371977A JP6371977A JPS53148392A JP S53148392 A JPS53148392 A JP S53148392A JP 6371977 A JP6371977 A JP 6371977A JP 6371977 A JP6371977 A JP 6371977A JP S53148392 A JPS53148392 A JP S53148392A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- nature
- forming
- substrate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To form correct opening without residual resist, by forming the resist film of multi-layer different in nature on the substrate surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6371977A JPS53148392A (en) | 1977-05-31 | 1977-05-31 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6371977A JPS53148392A (en) | 1977-05-31 | 1977-05-31 | Manufacture for semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53148392A true JPS53148392A (en) | 1978-12-23 |
Family
ID=13237471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6371977A Pending JPS53148392A (en) | 1977-05-31 | 1977-05-31 | Manufacture for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53148392A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS507910A (en) * | 1973-05-29 | 1975-01-27 |
-
1977
- 1977-05-31 JP JP6371977A patent/JPS53148392A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS507910A (en) * | 1973-05-29 | 1975-01-27 |
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