Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
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Filing date
Publication date
Application filed by Oki Electric Industry Co LtdfiledCriticalOki Electric Industry Co Ltd
Priority to JP15627976ApriorityCriticalpatent/JPS5380971A/en
Publication of JPS5380971ApublicationCriticalpatent/JPS5380971A/en
PURPOSE: To prevent the increase of the size for the lateral element and especially to eliminate the effect of the moisture, by just forming a lamination film of SiO2, PSG and Si3 N4 onto the Si substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP15627976A1976-12-271976-12-27Semiconductor element
PendingJPS5380971A
(en)