JPS5420670A - Surface stabilizing method of semiconductor elements - Google Patents

Surface stabilizing method of semiconductor elements

Info

Publication number
JPS5420670A
JPS5420670A JP8512177A JP8512177A JPS5420670A JP S5420670 A JPS5420670 A JP S5420670A JP 8512177 A JP8512177 A JP 8512177A JP 8512177 A JP8512177 A JP 8512177A JP S5420670 A JPS5420670 A JP S5420670A
Authority
JP
Japan
Prior art keywords
semiconductor elements
stabilizing method
surface stabilizing
psg
junction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8512177A
Other languages
Japanese (ja)
Inventor
Michio Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8512177A priority Critical patent/JPS5420670A/en
Publication of JPS5420670A publication Critical patent/JPS5420670A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To stabilize element surface by removing the portion over the pn junction having reached substrate surface and covering PSG on insulating film.
COPYRIGHT: (C)1979,JPO&Japio
JP8512177A 1977-07-18 1977-07-18 Surface stabilizing method of semiconductor elements Pending JPS5420670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8512177A JPS5420670A (en) 1977-07-18 1977-07-18 Surface stabilizing method of semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8512177A JPS5420670A (en) 1977-07-18 1977-07-18 Surface stabilizing method of semiconductor elements

Publications (1)

Publication Number Publication Date
JPS5420670A true JPS5420670A (en) 1979-02-16

Family

ID=13849788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8512177A Pending JPS5420670A (en) 1977-07-18 1977-07-18 Surface stabilizing method of semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5420670A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112034A (en) * 1980-11-17 1982-07-12 Int Rectifier Corp Planar structure improved for high withstand voltage semiconductor device
JPS6089929A (en) * 1983-10-21 1985-05-20 Fujitsu Ltd Manufacture of semiconductor device
JPS60113147U (en) * 1983-12-29 1985-07-31 昭和アルミニウム株式会社 Heating device in molten metal holding tank

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112034A (en) * 1980-11-17 1982-07-12 Int Rectifier Corp Planar structure improved for high withstand voltage semiconductor device
JPH0434311B2 (en) * 1980-11-17 1992-06-05 Intaanashonaru Rekuchifuaiyaa Corp
JPS6089929A (en) * 1983-10-21 1985-05-20 Fujitsu Ltd Manufacture of semiconductor device
JPS60113147U (en) * 1983-12-29 1985-07-31 昭和アルミニウム株式会社 Heating device in molten metal holding tank

Similar Documents

Publication Publication Date Title
JPS5293285A (en) Structure for semiconductor device
JPS5395571A (en) Semiconductor device
JPS5356972A (en) Mesa type semiconductor device
JPS5420670A (en) Surface stabilizing method of semiconductor elements
JPS53120289A (en) Manufacture of semiconductor device
JPS52120773A (en) Semiconductor element
JPS52129380A (en) Semiconductor device
JPS52128063A (en) Manufacture of semiconductor device
JPS5423474A (en) Mesa groove forming method for semiconductor element
JPS52113162A (en) Preparation of semiconductor device
JPS5353263A (en) Manufacture of semiconductor element
JPS53141574A (en) Manufacture of semiconductor device
JPS51145267A (en) Manufacture of semiconductor device
JPS5220773A (en) Semi-conductor element
JPS53139476A (en) Manufacture of semiconductor device
JPS52141566A (en) Semiconductor device and its manufacture
JPS51112179A (en) Processing method of the semiconductor
JPS5325363A (en) Semiconductor element
JPS5335375A (en) Heating method
JPS53147479A (en) Production of semiconductor device
JPS51134082A (en) Method to manufacture the semiconductor unit
JPS52141565A (en) Manufacture of semiconductor unit
JPS5394876A (en) Manufacture of semiconductor device
JPS5434784A (en) Semiconductor integrated circuit device
JPS53124065A (en) Manufacture of semiconductor device