JPS52124884A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52124884A
JPS52124884A JP4218176A JP4218176A JPS52124884A JP S52124884 A JPS52124884 A JP S52124884A JP 4218176 A JP4218176 A JP 4218176A JP 4218176 A JP4218176 A JP 4218176A JP S52124884 A JPS52124884 A JP S52124884A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
patterns
film
disconnection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4218176A
Other languages
Japanese (ja)
Inventor
Juro Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4218176A priority Critical patent/JPS52124884A/en
Publication of JPS52124884A publication Critical patent/JPS52124884A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: Disconnection of metal wiring is avoided by forming a thin etching-resistant film through rotary coating on the surface of a semiconductor formed with serrated patterns by a photoetching method, and removing said film from the surface to a given thickness in its thickness direction to expose a part of the patterns and removing this portion alone.
COPYRIGHT: (C)1977,JPO&Japio
JP4218176A 1976-04-13 1976-04-13 Production of semiconductor device Pending JPS52124884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4218176A JPS52124884A (en) 1976-04-13 1976-04-13 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4218176A JPS52124884A (en) 1976-04-13 1976-04-13 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52124884A true JPS52124884A (en) 1977-10-20

Family

ID=12628808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4218176A Pending JPS52124884A (en) 1976-04-13 1976-04-13 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52124884A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147253A (en) * 1981-03-06 1982-09-11 Seiko Epson Corp Manufacture of semiconductor device
JPS58111366A (en) * 1981-12-25 1983-07-02 Fuji Xerox Co Ltd Long-sized thin-film reading element
JPS58202554A (en) * 1982-05-21 1983-11-25 Nec Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997571A (en) * 1973-01-17 1974-09-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4997571A (en) * 1973-01-17 1974-09-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57147253A (en) * 1981-03-06 1982-09-11 Seiko Epson Corp Manufacture of semiconductor device
JPS58111366A (en) * 1981-12-25 1983-07-02 Fuji Xerox Co Ltd Long-sized thin-film reading element
JPS58202554A (en) * 1982-05-21 1983-11-25 Nec Corp Semiconductor device

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