JPS5236978A - Process for production of semiconductor devices - Google Patents

Process for production of semiconductor devices

Info

Publication number
JPS5236978A
JPS5236978A JP11262775A JP11262775A JPS5236978A JP S5236978 A JPS5236978 A JP S5236978A JP 11262775 A JP11262775 A JP 11262775A JP 11262775 A JP11262775 A JP 11262775A JP S5236978 A JPS5236978 A JP S5236978A
Authority
JP
Japan
Prior art keywords
production
semiconductor devices
carriers
variation
reduce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11262775A
Other languages
Japanese (ja)
Inventor
Tadanobu Hayashi
Sadao Okano
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11262775A priority Critical patent/JPS5236978A/en
Publication of JPS5236978A publication Critical patent/JPS5236978A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To control lifetime of a small number of carriers in semiconductor substrate and reduce its variation.
COPYRIGHT: (C)1977,JPO&Japio
JP11262775A 1975-09-19 1975-09-19 Process for production of semiconductor devices Pending JPS5236978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11262775A JPS5236978A (en) 1975-09-19 1975-09-19 Process for production of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11262775A JPS5236978A (en) 1975-09-19 1975-09-19 Process for production of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS5236978A true JPS5236978A (en) 1977-03-22

Family

ID=14591456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11262775A Pending JPS5236978A (en) 1975-09-19 1975-09-19 Process for production of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS5236978A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5453960A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Manufacture for semiconductor element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5453960A (en) * 1977-10-07 1979-04-27 Hitachi Ltd Manufacture for semiconductor element
JPS5837984B2 (en) * 1977-10-07 1983-08-19 Hitachi Ltd

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