JPS52116082A - Preparation of mos type semiconductor device - Google Patents

Preparation of mos type semiconductor device

Info

Publication number
JPS52116082A
JPS52116082A JP3291476A JP3291476A JPS52116082A JP S52116082 A JPS52116082 A JP S52116082A JP 3291476 A JP3291476 A JP 3291476A JP 3291476 A JP3291476 A JP 3291476A JP S52116082 A JPS52116082 A JP S52116082A
Authority
JP
Japan
Prior art keywords
preparation
semiconductor device
type semiconductor
mos type
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3291476A
Other languages
Japanese (ja)
Inventor
Masahiko Yasuoka
Hiroshi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3291476A priority Critical patent/JPS52116082A/en
Publication of JPS52116082A publication Critical patent/JPS52116082A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce a junction leak by forming a thin N type zone on a P type substrate by self-matching, opening a contact hole in the zone to form deeply a N+ zone through a polysilicon film and forming an aluminium wiring film on the polysilicon film.
COPYRIGHT: (C)1977,JPO&Japio
JP3291476A 1976-03-25 1976-03-25 Preparation of mos type semiconductor device Pending JPS52116082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3291476A JPS52116082A (en) 1976-03-25 1976-03-25 Preparation of mos type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3291476A JPS52116082A (en) 1976-03-25 1976-03-25 Preparation of mos type semiconductor device

Publications (1)

Publication Number Publication Date
JPS52116082A true JPS52116082A (en) 1977-09-29

Family

ID=12372154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3291476A Pending JPS52116082A (en) 1976-03-25 1976-03-25 Preparation of mos type semiconductor device

Country Status (1)

Country Link
JP (1) JPS52116082A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5559773A (en) * 1978-10-27 1980-05-06 Hitachi Ltd Method of fabricating mis semiconductor device
JPS5635470A (en) * 1979-08-30 1981-04-08 Nec Corp Semiconductor device
JPS5650570A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Manufacture of semiconductor device
JPS5664466A (en) * 1979-10-31 1981-06-01 Hitachi Ltd Manufacture of semiconductor device
JPS5787174A (en) * 1980-11-20 1982-05-31 Seiko Epson Corp Semiconductor integrated circuit device
JPS61181147A (en) * 1985-02-06 1986-08-13 Nec Corp Manufacture of semiconductor device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914792A (en) * 1972-04-14 1974-02-08
JPS50106588A (en) * 1974-01-29 1975-08-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914792A (en) * 1972-04-14 1974-02-08
JPS50106588A (en) * 1974-01-29 1975-08-22

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5559773A (en) * 1978-10-27 1980-05-06 Hitachi Ltd Method of fabricating mis semiconductor device
JPS5635470A (en) * 1979-08-30 1981-04-08 Nec Corp Semiconductor device
JPS5650570A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Manufacture of semiconductor device
JPS5664466A (en) * 1979-10-31 1981-06-01 Hitachi Ltd Manufacture of semiconductor device
JPS5787174A (en) * 1980-11-20 1982-05-31 Seiko Epson Corp Semiconductor integrated circuit device
JPS61181147A (en) * 1985-02-06 1986-08-13 Nec Corp Manufacture of semiconductor device

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