JPS52139378A - Integrated treatment apparatus for semiconductor wafers - Google Patents
Integrated treatment apparatus for semiconductor wafersInfo
- Publication number
- JPS52139378A JPS52139378A JP5537376A JP5537376A JPS52139378A JP S52139378 A JPS52139378 A JP S52139378A JP 5537376 A JP5537376 A JP 5537376A JP 5537376 A JP5537376 A JP 5537376A JP S52139378 A JPS52139378 A JP S52139378A
- Authority
- JP
- Japan
- Prior art keywords
- treatment apparatus
- semiconductor wafers
- integrated treatment
- control
- treating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To obviate human intervening and at the same time make the entire apparatus compact by integrating and automating all the treating works, setting of treating conditions and control within control processes of diffusion process in particular.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5537376A JPS5945219B2 (en) | 1976-05-17 | 1976-05-17 | wafer processing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5537376A JPS5945219B2 (en) | 1976-05-17 | 1976-05-17 | wafer processing equipment |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19588085A Division JPS6169121A (en) | 1985-09-06 | 1985-09-06 | Heat treatment device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52139378A true JPS52139378A (en) | 1977-11-21 |
JPS5945219B2 JPS5945219B2 (en) | 1984-11-05 |
Family
ID=12996672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5537376A Expired JPS5945219B2 (en) | 1976-05-17 | 1976-05-17 | wafer processing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5945219B2 (en) |
Cited By (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54111758A (en) * | 1978-02-22 | 1979-09-01 | Hitachi Ltd | Heat treatment unit and boat pick up method from heat treatment unit |
JPS5599739A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Wafer treating method and its equipment |
JPS5717139U (en) * | 1980-07-02 | 1982-01-28 | ||
JPS5764949A (en) * | 1980-10-09 | 1982-04-20 | Hitachi Ltd | Continous processor |
JPS5893322A (en) * | 1981-11-30 | 1983-06-03 | Semiconductor Energy Lab Co Ltd | Manufacturing apparatus for semiconductor device |
JPS5893321A (en) * | 1981-11-30 | 1983-06-03 | Semiconductor Energy Lab Co Ltd | Manufacturing apparatus for semiconductor device |
JPS5951542A (en) * | 1983-07-27 | 1984-03-26 | Toshiba Corp | Heat treatment apparatus for semiconductor |
JPS5958855A (en) * | 1982-08-30 | 1984-04-04 | シ−メンス・アクチエンゲセルシヤフト | Power semiconductor module |
JPS5999734A (en) * | 1982-11-30 | 1984-06-08 | Nec Corp | Conveyor for wafer |
JPS59124712A (en) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | Semiconductor device manufacturing apparatus |
JPS59163232A (en) * | 1983-03-04 | 1984-09-14 | Hitachi Ltd | Delivering device |
JPS6063925A (en) * | 1984-07-04 | 1985-04-12 | Hitachi Ltd | Wafer handling method |
JPS60258459A (en) * | 1984-06-04 | 1985-12-20 | Deisuko Saiyaa Japan:Kk | Transferring apparatus of wafer for vertical type heat-treating furnace |
JPS615541A (en) * | 1984-06-20 | 1986-01-11 | Hitachi Electronics Eng Co Ltd | Shifting device |
JPS61166038A (en) * | 1985-12-25 | 1986-07-26 | Hitachi Ltd | Wafer processing equipment |
JPS6242431A (en) * | 1986-05-15 | 1987-02-24 | Sony Corp | Processor |
JPS62130515A (en) * | 1985-12-02 | 1987-06-12 | Toshiba Mach Co Ltd | Semiconductor manufacturing equipment |
JPH01121923U (en) * | 1988-02-12 | 1989-08-18 | ||
JPH01209737A (en) * | 1988-02-17 | 1989-08-23 | Teru Kyushu Kk | Semiconductor manufacturing apparatus |
JPH0480942A (en) * | 1990-07-24 | 1992-03-13 | Kawasaki Steel Corp | Stocker for semiconductor wafer cassette |
JPH04249320A (en) * | 1991-02-05 | 1992-09-04 | Mitsubishi Electric Corp | Transport system of automatic cleaning apparatus |
JPH05217975A (en) * | 1992-01-08 | 1993-08-27 | Nec Corp | Semiconductor wet processor |
JPH06338555A (en) * | 1992-12-21 | 1994-12-06 | Dainippon Screen Mfg Co Ltd | Board processing device |
JPH0686336U (en) * | 1993-05-21 | 1994-12-13 | 住友精密工業株式会社 | Carrier cleaning equipment |
JPH0774117A (en) * | 1994-07-25 | 1995-03-17 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
JPH0774118A (en) * | 1994-07-25 | 1995-03-17 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
-
1976
- 1976-05-17 JP JP5537376A patent/JPS5945219B2/en not_active Expired
Cited By (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54111758A (en) * | 1978-02-22 | 1979-09-01 | Hitachi Ltd | Heat treatment unit and boat pick up method from heat treatment unit |
JPS627687B2 (en) * | 1978-02-22 | 1987-02-18 | Hitachi Ltd | |
JPS5599739A (en) * | 1979-01-26 | 1980-07-30 | Hitachi Ltd | Wafer treating method and its equipment |
JPS5717139U (en) * | 1980-07-02 | 1982-01-28 | ||
JPS6220999Y2 (en) * | 1980-07-02 | 1987-05-28 | ||
JPS5764949A (en) * | 1980-10-09 | 1982-04-20 | Hitachi Ltd | Continous processor |
JPS5893322A (en) * | 1981-11-30 | 1983-06-03 | Semiconductor Energy Lab Co Ltd | Manufacturing apparatus for semiconductor device |
JPS5893321A (en) * | 1981-11-30 | 1983-06-03 | Semiconductor Energy Lab Co Ltd | Manufacturing apparatus for semiconductor device |
JPH0337730B2 (en) * | 1981-11-30 | 1991-06-06 | Handotai Energy Kenkyusho | |
JPH0370367B2 (en) * | 1981-11-30 | 1991-11-07 | Handotai Energy Kenkyusho | |
JPS5958855A (en) * | 1982-08-30 | 1984-04-04 | シ−メンス・アクチエンゲセルシヤフト | Power semiconductor module |
JPS5999734A (en) * | 1982-11-30 | 1984-06-08 | Nec Corp | Conveyor for wafer |
JPS59124712A (en) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | Semiconductor device manufacturing apparatus |
JPH0532292B2 (en) * | 1983-03-04 | 1993-05-14 | Hitachi Ltd | |
JPS59163232A (en) * | 1983-03-04 | 1984-09-14 | Hitachi Ltd | Delivering device |
JPS5951542A (en) * | 1983-07-27 | 1984-03-26 | Toshiba Corp | Heat treatment apparatus for semiconductor |
JPS60258459A (en) * | 1984-06-04 | 1985-12-20 | Deisuko Saiyaa Japan:Kk | Transferring apparatus of wafer for vertical type heat-treating furnace |
JPH0586066B2 (en) * | 1984-06-04 | 1993-12-09 | Disco Abrasive Systems Ltd | |
JPH0527257B2 (en) * | 1984-06-20 | 1993-04-20 | Hitachi Denshi Enjiniaringu Kk | |
JPS615541A (en) * | 1984-06-20 | 1986-01-11 | Hitachi Electronics Eng Co Ltd | Shifting device |
JPS6063925A (en) * | 1984-07-04 | 1985-04-12 | Hitachi Ltd | Wafer handling method |
JPH0616488B2 (en) * | 1985-12-02 | 1994-03-02 | 東芝機械株式会社 | Semiconductor manufacturing equipment |
JPS62130515A (en) * | 1985-12-02 | 1987-06-12 | Toshiba Mach Co Ltd | Semiconductor manufacturing equipment |
JPS61166038A (en) * | 1985-12-25 | 1986-07-26 | Hitachi Ltd | Wafer processing equipment |
JPS6258147B2 (en) * | 1985-12-25 | 1987-12-04 | Hitachi Ltd | |
JPS6242431A (en) * | 1986-05-15 | 1987-02-24 | Sony Corp | Processor |
JPS6253945B2 (en) * | 1986-05-15 | 1987-11-12 | Sony Corp | |
JPH01121923U (en) * | 1988-02-12 | 1989-08-18 | ||
JPH01209737A (en) * | 1988-02-17 | 1989-08-23 | Teru Kyushu Kk | Semiconductor manufacturing apparatus |
JPH0480942A (en) * | 1990-07-24 | 1992-03-13 | Kawasaki Steel Corp | Stocker for semiconductor wafer cassette |
JPH04249320A (en) * | 1991-02-05 | 1992-09-04 | Mitsubishi Electric Corp | Transport system of automatic cleaning apparatus |
JPH05217975A (en) * | 1992-01-08 | 1993-08-27 | Nec Corp | Semiconductor wet processor |
JPH06338555A (en) * | 1992-12-21 | 1994-12-06 | Dainippon Screen Mfg Co Ltd | Board processing device |
JP3042576B2 (en) * | 1992-12-21 | 2000-05-15 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
JPH0686336U (en) * | 1993-05-21 | 1994-12-13 | 住友精密工業株式会社 | Carrier cleaning equipment |
JPH0774117A (en) * | 1994-07-25 | 1995-03-17 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
JPH0774118A (en) * | 1994-07-25 | 1995-03-17 | Semiconductor Energy Lab Co Ltd | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS5945219B2 (en) | 1984-11-05 |
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