JPS52139378A - Integrated treatment apparatus for semiconductor wafers - Google Patents

Integrated treatment apparatus for semiconductor wafers

Info

Publication number
JPS52139378A
JPS52139378A JP5537376A JP5537376A JPS52139378A JP S52139378 A JPS52139378 A JP S52139378A JP 5537376 A JP5537376 A JP 5537376A JP 5537376 A JP5537376 A JP 5537376A JP S52139378 A JPS52139378 A JP S52139378A
Authority
JP
Japan
Prior art keywords
treatment apparatus
semiconductor wafers
integrated treatment
control
treating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5537376A
Other languages
Japanese (ja)
Other versions
JPS5945219B2 (en
Inventor
Hiroto Nagatomo
Jun Suzuki
Hiroshi Maejima
Mutsuyo Kanetani
Ryoichi Okuda
Tetsuya Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5537376A priority Critical patent/JPS5945219B2/en
Publication of JPS52139378A publication Critical patent/JPS52139378A/en
Publication of JPS5945219B2 publication Critical patent/JPS5945219B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To obviate human intervening and at the same time make the entire apparatus compact by integrating and automating all the treating works, setting of treating conditions and control within control processes of diffusion process in particular.
COPYRIGHT: (C)1977,JPO&Japio
JP5537376A 1976-05-17 1976-05-17 wafer processing equipment Expired JPS5945219B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5537376A JPS5945219B2 (en) 1976-05-17 1976-05-17 wafer processing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5537376A JPS5945219B2 (en) 1976-05-17 1976-05-17 wafer processing equipment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP19588085A Division JPS6169121A (en) 1985-09-06 1985-09-06 Heat treatment device

Publications (2)

Publication Number Publication Date
JPS52139378A true JPS52139378A (en) 1977-11-21
JPS5945219B2 JPS5945219B2 (en) 1984-11-05

Family

ID=12996672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5537376A Expired JPS5945219B2 (en) 1976-05-17 1976-05-17 wafer processing equipment

Country Status (1)

Country Link
JP (1) JPS5945219B2 (en)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111758A (en) * 1978-02-22 1979-09-01 Hitachi Ltd Heat treatment unit and boat pick up method from heat treatment unit
JPS5599739A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Wafer treating method and its equipment
JPS5717139U (en) * 1980-07-02 1982-01-28
JPS5764949A (en) * 1980-10-09 1982-04-20 Hitachi Ltd Continous processor
JPS5893322A (en) * 1981-11-30 1983-06-03 Semiconductor Energy Lab Co Ltd Manufacturing apparatus for semiconductor device
JPS5893321A (en) * 1981-11-30 1983-06-03 Semiconductor Energy Lab Co Ltd Manufacturing apparatus for semiconductor device
JPS5951542A (en) * 1983-07-27 1984-03-26 Toshiba Corp Heat treatment apparatus for semiconductor
JPS5958855A (en) * 1982-08-30 1984-04-04 シ−メンス・アクチエンゲセルシヤフト Power semiconductor module
JPS5999734A (en) * 1982-11-30 1984-06-08 Nec Corp Conveyor for wafer
JPS59124712A (en) * 1982-12-29 1984-07-18 Fujitsu Ltd Semiconductor device manufacturing apparatus
JPS59163232A (en) * 1983-03-04 1984-09-14 Hitachi Ltd Delivering device
JPS6063925A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Wafer handling method
JPS60258459A (en) * 1984-06-04 1985-12-20 Deisuko Saiyaa Japan:Kk Transferring apparatus of wafer for vertical type heat-treating furnace
JPS615541A (en) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd Shifting device
JPS61166038A (en) * 1985-12-25 1986-07-26 Hitachi Ltd Wafer processing equipment
JPS6242431A (en) * 1986-05-15 1987-02-24 Sony Corp Processor
JPS62130515A (en) * 1985-12-02 1987-06-12 Toshiba Mach Co Ltd Semiconductor manufacturing equipment
JPH01121923U (en) * 1988-02-12 1989-08-18
JPH01209737A (en) * 1988-02-17 1989-08-23 Teru Kyushu Kk Semiconductor manufacturing apparatus
JPH0480942A (en) * 1990-07-24 1992-03-13 Kawasaki Steel Corp Stocker for semiconductor wafer cassette
JPH04249320A (en) * 1991-02-05 1992-09-04 Mitsubishi Electric Corp Transport system of automatic cleaning apparatus
JPH05217975A (en) * 1992-01-08 1993-08-27 Nec Corp Semiconductor wet processor
JPH06338555A (en) * 1992-12-21 1994-12-06 Dainippon Screen Mfg Co Ltd Board processing device
JPH0686336U (en) * 1993-05-21 1994-12-13 住友精密工業株式会社 Carrier cleaning equipment
JPH0774117A (en) * 1994-07-25 1995-03-17 Semiconductor Energy Lab Co Ltd Manufacture of semiconductor device
JPH0774118A (en) * 1994-07-25 1995-03-17 Semiconductor Energy Lab Co Ltd Manufacture of semiconductor device

Cited By (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54111758A (en) * 1978-02-22 1979-09-01 Hitachi Ltd Heat treatment unit and boat pick up method from heat treatment unit
JPS627687B2 (en) * 1978-02-22 1987-02-18 Hitachi Ltd
JPS5599739A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Wafer treating method and its equipment
JPS5717139U (en) * 1980-07-02 1982-01-28
JPS6220999Y2 (en) * 1980-07-02 1987-05-28
JPS5764949A (en) * 1980-10-09 1982-04-20 Hitachi Ltd Continous processor
JPS5893322A (en) * 1981-11-30 1983-06-03 Semiconductor Energy Lab Co Ltd Manufacturing apparatus for semiconductor device
JPS5893321A (en) * 1981-11-30 1983-06-03 Semiconductor Energy Lab Co Ltd Manufacturing apparatus for semiconductor device
JPH0337730B2 (en) * 1981-11-30 1991-06-06 Handotai Energy Kenkyusho
JPH0370367B2 (en) * 1981-11-30 1991-11-07 Handotai Energy Kenkyusho
JPS5958855A (en) * 1982-08-30 1984-04-04 シ−メンス・アクチエンゲセルシヤフト Power semiconductor module
JPS5999734A (en) * 1982-11-30 1984-06-08 Nec Corp Conveyor for wafer
JPS59124712A (en) * 1982-12-29 1984-07-18 Fujitsu Ltd Semiconductor device manufacturing apparatus
JPH0532292B2 (en) * 1983-03-04 1993-05-14 Hitachi Ltd
JPS59163232A (en) * 1983-03-04 1984-09-14 Hitachi Ltd Delivering device
JPS5951542A (en) * 1983-07-27 1984-03-26 Toshiba Corp Heat treatment apparatus for semiconductor
JPS60258459A (en) * 1984-06-04 1985-12-20 Deisuko Saiyaa Japan:Kk Transferring apparatus of wafer for vertical type heat-treating furnace
JPH0586066B2 (en) * 1984-06-04 1993-12-09 Disco Abrasive Systems Ltd
JPH0527257B2 (en) * 1984-06-20 1993-04-20 Hitachi Denshi Enjiniaringu Kk
JPS615541A (en) * 1984-06-20 1986-01-11 Hitachi Electronics Eng Co Ltd Shifting device
JPS6063925A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Wafer handling method
JPH0616488B2 (en) * 1985-12-02 1994-03-02 東芝機械株式会社 Semiconductor manufacturing equipment
JPS62130515A (en) * 1985-12-02 1987-06-12 Toshiba Mach Co Ltd Semiconductor manufacturing equipment
JPS61166038A (en) * 1985-12-25 1986-07-26 Hitachi Ltd Wafer processing equipment
JPS6258147B2 (en) * 1985-12-25 1987-12-04 Hitachi Ltd
JPS6242431A (en) * 1986-05-15 1987-02-24 Sony Corp Processor
JPS6253945B2 (en) * 1986-05-15 1987-11-12 Sony Corp
JPH01121923U (en) * 1988-02-12 1989-08-18
JPH01209737A (en) * 1988-02-17 1989-08-23 Teru Kyushu Kk Semiconductor manufacturing apparatus
JPH0480942A (en) * 1990-07-24 1992-03-13 Kawasaki Steel Corp Stocker for semiconductor wafer cassette
JPH04249320A (en) * 1991-02-05 1992-09-04 Mitsubishi Electric Corp Transport system of automatic cleaning apparatus
JPH05217975A (en) * 1992-01-08 1993-08-27 Nec Corp Semiconductor wet processor
JPH06338555A (en) * 1992-12-21 1994-12-06 Dainippon Screen Mfg Co Ltd Board processing device
JP3042576B2 (en) * 1992-12-21 2000-05-15 大日本スクリーン製造株式会社 Substrate processing equipment
JPH0686336U (en) * 1993-05-21 1994-12-13 住友精密工業株式会社 Carrier cleaning equipment
JPH0774117A (en) * 1994-07-25 1995-03-17 Semiconductor Energy Lab Co Ltd Manufacture of semiconductor device
JPH0774118A (en) * 1994-07-25 1995-03-17 Semiconductor Energy Lab Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5945219B2 (en) 1984-11-05

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