JPS5362476A - Processing method of semiconductor surface - Google Patents

Processing method of semiconductor surface

Info

Publication number
JPS5362476A
JPS5362476A JP13823076A JP13823076A JPS5362476A JP S5362476 A JPS5362476 A JP S5362476A JP 13823076 A JP13823076 A JP 13823076A JP 13823076 A JP13823076 A JP 13823076A JP S5362476 A JPS5362476 A JP S5362476A
Authority
JP
Japan
Prior art keywords
processing method
semiconductor surface
semiconductors
contaminating substances
adsorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13823076A
Other languages
Japanese (ja)
Inventor
Masahiko Ueda
Yoshihiro Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13823076A priority Critical patent/JPS5362476A/en
Publication of JPS5362476A publication Critical patent/JPS5362476A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent the adsorption of contaminating substances at the surface treating by beforehand removing the contaminating substances by charging removing semiconductors of the same or different crystal axes as or from those of the semiconductors to be treated into a treating solution.
COPYRIGHT: (C)1978,JPO&Japio
JP13823076A 1976-11-16 1976-11-16 Processing method of semiconductor surface Pending JPS5362476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13823076A JPS5362476A (en) 1976-11-16 1976-11-16 Processing method of semiconductor surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13823076A JPS5362476A (en) 1976-11-16 1976-11-16 Processing method of semiconductor surface

Publications (1)

Publication Number Publication Date
JPS5362476A true JPS5362476A (en) 1978-06-03

Family

ID=15217121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13823076A Pending JPS5362476A (en) 1976-11-16 1976-11-16 Processing method of semiconductor surface

Country Status (1)

Country Link
JP (1) JPS5362476A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645032A (en) * 1979-09-19 1981-04-24 Matsushita Electric Ind Co Ltd Cleaning method for hf solution
JPH03102827A (en) * 1989-09-18 1991-04-30 Hitachi Ltd Etching method for hf chemical

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645032A (en) * 1979-09-19 1981-04-24 Matsushita Electric Ind Co Ltd Cleaning method for hf solution
JPH03102827A (en) * 1989-09-18 1991-04-30 Hitachi Ltd Etching method for hf chemical

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