JPS5264870A - Cleaning of semiconductor - Google Patents

Cleaning of semiconductor

Info

Publication number
JPS5264870A
JPS5264870A JP14072475A JP14072475A JPS5264870A JP S5264870 A JPS5264870 A JP S5264870A JP 14072475 A JP14072475 A JP 14072475A JP 14072475 A JP14072475 A JP 14072475A JP S5264870 A JPS5264870 A JP S5264870A
Authority
JP
Japan
Prior art keywords
cleaning
semiconductor
hydroxylalkyl
trialkyl
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14072475A
Other languages
Japanese (ja)
Other versions
JPS5320376B2 (en
Inventor
Hisashi Muraoka
Masafumi Asano
Taizo Ohashi
Yuzo Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14072475A priority Critical patent/JPS5264870A/en
Priority to GB190479A priority patent/GB1573208A/en
Priority to GB35164/76A priority patent/GB1573206A/en
Priority to NLAANVRAGE7609602,A priority patent/NL185116C/en
Priority to DE2639004A priority patent/DE2639004C2/en
Publication of JPS5264870A publication Critical patent/JPS5264870A/en
Publication of JPS5320376B2 publication Critical patent/JPS5320376B2/ja
Priority to US05/927,139 priority patent/US4239661A/en
Priority to US06/213,317 priority patent/US4339340A/en
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • ing And Chemical Polishing (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To perform simple and effective degreasing and removal of in organic impurities by treating the surface of semiconductors and the film surface in contact therewith a trialkyl (hydroxylalkyl) ammonium hydroxide solution.
COPYRIGHT: (C)1977,JPO&Japio
JP14072475A 1975-11-26 1975-11-26 Cleaning of semiconductor Granted JPS5264870A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP14072475A JPS5264870A (en) 1975-11-26 1975-11-26 Cleaning of semiconductor
GB190479A GB1573208A (en) 1975-11-26 1976-08-24 Surface treating agent adapted for intermediate products of a semiconductor device
GB35164/76A GB1573206A (en) 1975-11-26 1976-08-24 Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices
NLAANVRAGE7609602,A NL185116C (en) 1975-11-26 1976-08-30 METHOD FOR TREATING SURFACES OF INTERMEDIATES IN THE MANUFACTURE OF SEMICONDUCTORS
DE2639004A DE2639004C2 (en) 1975-11-26 1976-08-30 Aqueous solution for the surface treatment of intermediate products in the manufacture of semiconductor components
US05/927,139 US4239661A (en) 1975-11-26 1978-07-21 Surface-treating agent adapted for intermediate products of a semiconductor device
US06/213,317 US4339340A (en) 1975-11-26 1980-12-05 Surface-treating agent adapted for intermediate products of a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14072475A JPS5264870A (en) 1975-11-26 1975-11-26 Cleaning of semiconductor

Publications (2)

Publication Number Publication Date
JPS5264870A true JPS5264870A (en) 1977-05-28
JPS5320376B2 JPS5320376B2 (en) 1978-06-26

Family

ID=15275221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14072475A Granted JPS5264870A (en) 1975-11-26 1975-11-26 Cleaning of semiconductor

Country Status (1)

Country Link
JP (1) JPS5264870A (en)

Also Published As

Publication number Publication date
JPS5320376B2 (en) 1978-06-26

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