JPS5264870A - Cleaning of semiconductor - Google Patents
Cleaning of semiconductorInfo
- Publication number
- JPS5264870A JPS5264870A JP14072475A JP14072475A JPS5264870A JP S5264870 A JPS5264870 A JP S5264870A JP 14072475 A JP14072475 A JP 14072475A JP 14072475 A JP14072475 A JP 14072475A JP S5264870 A JPS5264870 A JP S5264870A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- semiconductor
- hydroxylalkyl
- trialkyl
- semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Abstract
PURPOSE: To perform simple and effective degreasing and removal of in organic impurities by treating the surface of semiconductors and the film surface in contact therewith a trialkyl (hydroxylalkyl) ammonium hydroxide solution.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14072475A JPS5264870A (en) | 1975-11-26 | 1975-11-26 | Cleaning of semiconductor |
GB190479A GB1573208A (en) | 1975-11-26 | 1976-08-24 | Surface treating agent adapted for intermediate products of a semiconductor device |
GB35164/76A GB1573206A (en) | 1975-11-26 | 1976-08-24 | Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices |
NLAANVRAGE7609602,A NL185116C (en) | 1975-11-26 | 1976-08-30 | METHOD FOR TREATING SURFACES OF INTERMEDIATES IN THE MANUFACTURE OF SEMICONDUCTORS |
DE2639004A DE2639004C2 (en) | 1975-11-26 | 1976-08-30 | Aqueous solution for the surface treatment of intermediate products in the manufacture of semiconductor components |
US05/927,139 US4239661A (en) | 1975-11-26 | 1978-07-21 | Surface-treating agent adapted for intermediate products of a semiconductor device |
US06/213,317 US4339340A (en) | 1975-11-26 | 1980-12-05 | Surface-treating agent adapted for intermediate products of a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14072475A JPS5264870A (en) | 1975-11-26 | 1975-11-26 | Cleaning of semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5264870A true JPS5264870A (en) | 1977-05-28 |
JPS5320376B2 JPS5320376B2 (en) | 1978-06-26 |
Family
ID=15275221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14072475A Granted JPS5264870A (en) | 1975-11-26 | 1975-11-26 | Cleaning of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5264870A (en) |
-
1975
- 1975-11-26 JP JP14072475A patent/JPS5264870A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5320376B2 (en) | 1978-06-26 |
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