JPS5264879A - Removal of silicon deposited on semiconductor treating parts - Google Patents
Removal of silicon deposited on semiconductor treating partsInfo
- Publication number
- JPS5264879A JPS5264879A JP14072675A JP14072675A JPS5264879A JP S5264879 A JPS5264879 A JP S5264879A JP 14072675 A JP14072675 A JP 14072675A JP 14072675 A JP14072675 A JP 14072675A JP S5264879 A JPS5264879 A JP S5264879A
- Authority
- JP
- Japan
- Prior art keywords
- removal
- silicon deposited
- treating parts
- semiconductor treating
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To make possible the effective removal of the powdery silicon and amorphous silicon deposited on quartz boats, crucibles, etc. by removing these through the use of a trialkyl (hydroxylalkyl) ammonium hydroxide solution.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14072675A JPS5264879A (en) | 1975-11-26 | 1975-11-26 | Removal of silicon deposited on semiconductor treating parts |
GB190479A GB1573208A (en) | 1975-11-26 | 1976-08-24 | Surface treating agent adapted for intermediate products of a semiconductor device |
GB35164/76A GB1573206A (en) | 1975-11-26 | 1976-08-24 | Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices |
NLAANVRAGE7609602,A NL185116C (en) | 1975-11-26 | 1976-08-30 | METHOD FOR TREATING SURFACES OF INTERMEDIATES IN THE MANUFACTURE OF SEMICONDUCTORS |
DE2639004A DE2639004C2 (en) | 1975-11-26 | 1976-08-30 | Aqueous solution for the surface treatment of intermediate products in the manufacture of semiconductor components |
US05/927,139 US4239661A (en) | 1975-11-26 | 1978-07-21 | Surface-treating agent adapted for intermediate products of a semiconductor device |
US06/213,317 US4339340A (en) | 1975-11-26 | 1980-12-05 | Surface-treating agent adapted for intermediate products of a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14072675A JPS5264879A (en) | 1975-11-26 | 1975-11-26 | Removal of silicon deposited on semiconductor treating parts |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5264879A true JPS5264879A (en) | 1977-05-28 |
JPS5634090B2 JPS5634090B2 (en) | 1981-08-07 |
Family
ID=15275269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14072675A Granted JPS5264879A (en) | 1975-11-26 | 1975-11-26 | Removal of silicon deposited on semiconductor treating parts |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5264879A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876954U (en) * | 1981-11-16 | 1983-05-24 | 株式会社日立製作所 | terminal device |
-
1975
- 1975-11-26 JP JP14072675A patent/JPS5264879A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876954U (en) * | 1981-11-16 | 1983-05-24 | 株式会社日立製作所 | terminal device |
Also Published As
Publication number | Publication date |
---|---|
JPS5634090B2 (en) | 1981-08-07 |
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