JPS5264879A - Removal of silicon deposited on semiconductor treating parts - Google Patents

Removal of silicon deposited on semiconductor treating parts

Info

Publication number
JPS5264879A
JPS5264879A JP14072675A JP14072675A JPS5264879A JP S5264879 A JPS5264879 A JP S5264879A JP 14072675 A JP14072675 A JP 14072675A JP 14072675 A JP14072675 A JP 14072675A JP S5264879 A JPS5264879 A JP S5264879A
Authority
JP
Japan
Prior art keywords
removal
silicon deposited
treating parts
semiconductor treating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14072675A
Other languages
Japanese (ja)
Other versions
JPS5634090B2 (en
Inventor
Hisashi Muraoka
Masafumi Asano
Taizo Ohashi
Yuzo Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14072675A priority Critical patent/JPS5264879A/en
Priority to GB190479A priority patent/GB1573208A/en
Priority to GB35164/76A priority patent/GB1573206A/en
Priority to NLAANVRAGE7609602,A priority patent/NL185116C/en
Priority to DE2639004A priority patent/DE2639004C2/en
Publication of JPS5264879A publication Critical patent/JPS5264879A/en
Priority to US05/927,139 priority patent/US4239661A/en
Priority to US06/213,317 priority patent/US4339340A/en
Publication of JPS5634090B2 publication Critical patent/JPS5634090B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE: To make possible the effective removal of the powdery silicon and amorphous silicon deposited on quartz boats, crucibles, etc. by removing these through the use of a trialkyl (hydroxylalkyl) ammonium hydroxide solution.
COPYRIGHT: (C)1977,JPO&Japio
JP14072675A 1975-11-26 1975-11-26 Removal of silicon deposited on semiconductor treating parts Granted JPS5264879A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP14072675A JPS5264879A (en) 1975-11-26 1975-11-26 Removal of silicon deposited on semiconductor treating parts
GB190479A GB1573208A (en) 1975-11-26 1976-08-24 Surface treating agent adapted for intermediate products of a semiconductor device
GB35164/76A GB1573206A (en) 1975-11-26 1976-08-24 Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices
NLAANVRAGE7609602,A NL185116C (en) 1975-11-26 1976-08-30 METHOD FOR TREATING SURFACES OF INTERMEDIATES IN THE MANUFACTURE OF SEMICONDUCTORS
DE2639004A DE2639004C2 (en) 1975-11-26 1976-08-30 Aqueous solution for the surface treatment of intermediate products in the manufacture of semiconductor components
US05/927,139 US4239661A (en) 1975-11-26 1978-07-21 Surface-treating agent adapted for intermediate products of a semiconductor device
US06/213,317 US4339340A (en) 1975-11-26 1980-12-05 Surface-treating agent adapted for intermediate products of a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14072675A JPS5264879A (en) 1975-11-26 1975-11-26 Removal of silicon deposited on semiconductor treating parts

Publications (2)

Publication Number Publication Date
JPS5264879A true JPS5264879A (en) 1977-05-28
JPS5634090B2 JPS5634090B2 (en) 1981-08-07

Family

ID=15275269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14072675A Granted JPS5264879A (en) 1975-11-26 1975-11-26 Removal of silicon deposited on semiconductor treating parts

Country Status (1)

Country Link
JP (1) JPS5264879A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876954U (en) * 1981-11-16 1983-05-24 株式会社日立製作所 terminal device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876954U (en) * 1981-11-16 1983-05-24 株式会社日立製作所 terminal device

Also Published As

Publication number Publication date
JPS5634090B2 (en) 1981-08-07

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