JPS5382174A - Surface processing method for semiconductor device - Google Patents
Surface processing method for semiconductor deviceInfo
- Publication number
- JPS5382174A JPS5382174A JP15883076A JP15883076A JPS5382174A JP S5382174 A JPS5382174 A JP S5382174A JP 15883076 A JP15883076 A JP 15883076A JP 15883076 A JP15883076 A JP 15883076A JP S5382174 A JPS5382174 A JP S5382174A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- processing method
- surface processing
- etching
- residual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve the performance of element and to increase the yield rate, by surely preventing the residual of positive charges on the Si substrate surface after etching with alkali water solution.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15883076A JPS5382174A (en) | 1976-12-27 | 1976-12-27 | Surface processing method for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15883076A JPS5382174A (en) | 1976-12-27 | 1976-12-27 | Surface processing method for semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5382174A true JPS5382174A (en) | 1978-07-20 |
JPS576693B2 JPS576693B2 (en) | 1982-02-06 |
Family
ID=15680310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15883076A Granted JPS5382174A (en) | 1976-12-27 | 1976-12-27 | Surface processing method for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5382174A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS586621A (en) * | 1981-07-03 | 1983-01-14 | Mitsubishi Electric Corp | Malfunction preventing circuit |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55113444U (en) * | 1979-02-05 | 1980-08-09 | ||
JPS5918687U (en) * | 1982-07-29 | 1984-02-04 | 日信工業株式会社 | Control levers for motorcycles, etc. |
-
1976
- 1976-12-27 JP JP15883076A patent/JPS5382174A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS586621A (en) * | 1981-07-03 | 1983-01-14 | Mitsubishi Electric Corp | Malfunction preventing circuit |
Also Published As
Publication number | Publication date |
---|---|
JPS576693B2 (en) | 1982-02-06 |
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