JPS5382174A - Surface processing method for semiconductor device - Google Patents

Surface processing method for semiconductor device

Info

Publication number
JPS5382174A
JPS5382174A JP15883076A JP15883076A JPS5382174A JP S5382174 A JPS5382174 A JP S5382174A JP 15883076 A JP15883076 A JP 15883076A JP 15883076 A JP15883076 A JP 15883076A JP S5382174 A JPS5382174 A JP S5382174A
Authority
JP
Japan
Prior art keywords
semiconductor device
processing method
surface processing
etching
residual
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15883076A
Other languages
Japanese (ja)
Other versions
JPS576693B2 (en
Inventor
Misao Saga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP15883076A priority Critical patent/JPS5382174A/en
Publication of JPS5382174A publication Critical patent/JPS5382174A/en
Publication of JPS576693B2 publication Critical patent/JPS576693B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To improve the performance of element and to increase the yield rate, by surely preventing the residual of positive charges on the Si substrate surface after etching with alkali water solution.
COPYRIGHT: (C)1978,JPO&Japio
JP15883076A 1976-12-27 1976-12-27 Surface processing method for semiconductor device Granted JPS5382174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15883076A JPS5382174A (en) 1976-12-27 1976-12-27 Surface processing method for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15883076A JPS5382174A (en) 1976-12-27 1976-12-27 Surface processing method for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5382174A true JPS5382174A (en) 1978-07-20
JPS576693B2 JPS576693B2 (en) 1982-02-06

Family

ID=15680310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15883076A Granted JPS5382174A (en) 1976-12-27 1976-12-27 Surface processing method for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5382174A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586621A (en) * 1981-07-03 1983-01-14 Mitsubishi Electric Corp Malfunction preventing circuit

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55113444U (en) * 1979-02-05 1980-08-09
JPS5918687U (en) * 1982-07-29 1984-02-04 日信工業株式会社 Control levers for motorcycles, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586621A (en) * 1981-07-03 1983-01-14 Mitsubishi Electric Corp Malfunction preventing circuit

Also Published As

Publication number Publication date
JPS576693B2 (en) 1982-02-06

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